Related papers: Silicon Nitride MOMS Oscillator for Room Temperatu…
We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN…
Ponderomotive squeezing of light, where a mechanical oscillator creates quantum correlations between the phase and amplitude of the interacting light field, is a canonical signature of the quantum regime of optomechanics. At room…
Thermal noise is a major obstacle to observing quantum behavior in macroscopic systems. To mitigate its effect, quantum optomechanical experiments are typically performed in a cryogenic environment. However, this condition represents a…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…
Observation of quantum phenomena in cryogenic, optically cooled mechanical resonators has been recently achieved by a few experiments based on cavity optomechanics. A well-established experimental platform is based on a thin film…
We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane,…
Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are attractive for fundamental research and applications. However, it is challenging to maintain these mechanical properties while achieving strong coupling…
We study mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor ($Q$) metalized silicon nitride membranes at temperatures down to 14 mK using a three-dimensional optomechanical cavity. Below 200 mK, high-$Q$…
We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a supporting silicon frame, and measure the mechanical quality…
Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearch. Understanding thermal coupling between a membrane…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…
Sympathetic cooling with ultracold atoms and atomic ions enables ultralow temperatures in systems where direct laser or evaporative cooling is not possible. It has so far been limited to the cooling of other microscopic particles, with…
We report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated…
We develop a stoichiometric SiN membrane-based optoelectromechanical system, in which the properties of the mechanical resonator can be dynamically controlled by the piezoelectric actuation. The mode splitting is observed in the mechanical…
Exploiting quantum effects of mechanical motion, such as backaction evading measurements or squeezing, requires preparation of the oscillator in a high-purity state. The largest state purities in optomechanics to date have relied on…
Squeezing the quadrature noise of a harmonic oscillator used as a sensor can enhance its sensitivity in certain measurment schemes. The canonical approach, based on parametric modulation of the oscillation frequency, is usually limited to a…
In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN$_x$ membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress…
A potential experimental system, based on the Silicon Nitride (SiN) material, is proposed to generate steady-state room-temperature optomechanical entanglement. In the proposed structure, the nanostring interacts dispersively and reactively…
We demonstrate feedback cooling of a millimeter-scale, 40 kHz SiN membrane from room temperature to 5 mK (3000 phonons) using a Michelson interferometer, and discuss the challenges to ground state cooling without an optical cavity. This…