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STEM imaging is typically performed by raster scanning a focused electron probe over a sample. Here we investigate and compare three different scan patterns, making use of a programmable scan engine that allows to arbitrarily set the…

Applied Physics · Physics 2020-02-24 Abner Velazco , Magnus Nord , Armand Béché , Johan Verbeeck

High quality scanning transmission electron microscopy (STEM) data acquisition and analysis has become increasingly important due to the commercial demand for investigating the properties of complex materials such as battery cathodes;…

Aberration-corrected scanning transmission electron microscopes (STEM) provide sub-angstrom lateral resolution; however, the large convergence angle greatly reduces the depth of field. For microscopes with a small depth of field,…

Materials Science · Physics 2011-12-15 Robert Hovden , Huolin L. Xin , David A. Muller

We introduce a machine learning approach to determine the transition dynamics of silicon atoms on a single layer of carbon atoms, when stimulated by the electron beam of a scanning transmission electron microscope (STEM). Our method is…

This comprehensive review discusses the development of scanning electron microscopy and the application of this technology in different fields such as biology, nanobiotechnology and biomedical science. Besides being a tool for high…

Quantitative Methods · Quantitative Biology 2023-11-02 Aniruddha Acharya

While transmission electron microscopes (TEM) can achieve a much higher resolution than optical microscopes, they face challenges of damage to samples during the high energy processes involved. Here, we explore using computational ghost…

We introduce a denoising method for four-dimensional scanning transmission electron microscopy (4D-STEM) that relies on processing local, scan position-independent electron event-sparse data stacks, called event-sparse stack denoising. This…

Medical Physics · Physics 2025-12-12 Gregory Nordahl , Rebekka Klemmt , Espen Drath Bøjesen

Four-dimensional scanning transmission electron microscopy (4D-STEM) is one of the most rapidly growing modes of electron microscopy imaging. The advent of fast pixelated cameras and the associated data infrastructure have greatly…

Applications · Statistics 2019-08-27 Xin Li , Ondrej Dyck , Stephen Jesse , Andrew R. Lupini , Sergei V. Kalinin , Mark P. Oxley

Scanning transmission electron microscopy (STEM) is the most widespread adopted tool for atomic scale characterization of two-dimensional (2D) materials. Many 2D materials remain susceptible to electron beam damage, despite the standardized…

Materials Science · Physics 2021-08-11 Sytze de Graaf , Majid Ahmadi , Ivan Lazić , Eric G. T. Bosch , Bart J. Kooi

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

Mesoscale and Nanoscale Physics · Physics 2026-01-09 R. J. G. Elbertse , M. Xu , A. Keşkekler , S. Otte , R. A. Norte

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the…

Computer Vision and Pattern Recognition · Computer Science 2017-09-08 Shahar Tsiper , Or Dicker , Idan Kaizerman , Zeev Zohar , Mordechai Segev , Yonina C. Eldar

4D-STEM, in which the 2D diffraction plane is captured for each 2D scan position in the scanning transmission electron microscope (STEM) using a pixelated detector, is complementing and increasingly replacing existing imaging approaches.…

Instrumentation and Detectors · Physics 2022-07-27 Colum M. O'Leary , Benedikt Haas , Christoph T. Koch , Peter D. Nellist , Lewys Jones

The scanning electron microscopy (SEM) is probably one the most fascinating examination approach that has been used since more than two decades to detailed inspection of micro scale objects. Most of the scanning electron microscopes could…

Computer Vision and Pattern Recognition · Computer Science 2016-02-18 Wichai Shanklin

Analytical electron microscopy and spectroscopy of biological specimens, polymers, and other beam sensitive materials has been a challenging area due to irradiation damage. There is a pressing need to develop novel imaging and spectroscopic…

Machine Learning · Computer Science 2017-07-14 Yan Zhang , G. M. Dilshan Godaliyadda , Nicola Ferrier , Emine B. Gulsoy , Charles A. Bouman , Charudatta Phatak

Electron tomography has achieved higher resolution and quality at reduced doses with recent advances in compressed sensing. Compressed sensing (CS) theory exploits the inherent sparse signal structure to efficiently reconstruct…

Computational Physics · Physics 2020-12-02 Jonathan Schwartz , Huihuo Zheng , Marcus Hanwell , Yi Jiang , Robert Hovden

Here we show that compressive sensing allow 4-dimensional (4-D) STEM data to be obtained and accurately reconstructed with both high-speed and low fluence. The methodology needed to achieve these results compared to conventional 4-D…

The manuscript considers Scanning Transmission Electron Microscopy (STEM) images and derives transformations needed to correct various distortions occurring during scanning. These transformations form the basis for the correction algorithms…

Instrumentation and Detectors · Physics 2026-05-13 Pavel Potapov , Giulio Guzzinati

We present a method using Zernike moments for quantifying rotational and reflectional symmetries in scanning transmission electron microscopy (STEM) images, aimed at improving structural analysis of materials at the atomic scale. This…

Materials Science · Physics 2024-05-29 Jiadong Dan , Cheng Zhang , Xiaoxu Zhao , N. Duane Loh

Cryo Focused Ion-Beam Scanning Electron Microscopy (cryo FIB-SEM) enables three-dimensional and nanoscale imaging of biological specimens via a slice and view mechanism. The FIB-SEM experiments are, however, limited by a slow (typically,…