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Electron tomography has become a commonly used tool to investigate the three-dimensional (3D) structure of nanomaterials, including colloidal nanoparticle assemblies. However, electron microscopy is typically carried out under high vacuum…

Nonlinear processes in integrated, guiding systems are fundamental for both classical and quantum experiments. Integrated components allow for compact, modular and stable light-processing systems and as such their use in real-world systems…

Holography plays a crucial role in optics applications, but it traditionally requires complex setup and bulky devices, being unfavourable for optics integration. While metasurface-based holograms are ultra-compact and easy to realize,…

Optics · Physics 2024-06-17 Tong Liu , Changhong Dai , Dongyi Wang , Lei Zhou

Periodic or gradient subwavelength structures are basic configurations of photonic crystals and metamaterials. While the numerical simulations predict trivial loss, but the fabricated photonic crystal waveguides by E-beam lithography and…

Applied Physics · Physics 2021-04-20 Yahui Xiao , Feifan Wang , Dun Mao , Thomas Kananen , Tiantian Li , Hwaseob Lee , Zi Wang , Tingyi Gu

Controlling ultraviolet light at the nanoscale using optical Mie resonances holds great promise for a diverse set of applications, such as lithography, sterilization, and biospectroscopy. However, Mie resonances hosted by dielectric…

We report a systematic treatment of the holographic generation of electron Bessel beams, with a view to applications in electron microscopy. We describe in detail the theory underlying hologram patterning, as well as the actual…

We report on mask-less, high resolution etching of diamond surfaces, featuring sizes down to 10 nm. We use a scanning electron microscope (SEM) together with water vapor, which was injected by a needle directly onto the sample surface.…

Applied Physics · Physics 2019-09-04 Vasilis Dergianlis , Martin Geller , Dennis Oing , Nicolas Woehrl , Axel Lorke

Advances in material science, bio-electronic, and implantable medicine combined with recent requests for eco-friendly materials and technologies inevitably formulate new challenges for nano- and micro-patterning techniques. Overall, the…

Materials Science · Physics 2022-03-09 Artem K. Grebenko , Konstantin A. Motovilov , Anton V. Bubis , Albert G. Nasibulin

In this paper, a method for solving the initial structure of an off-axis multi-mirror system applied to extreme ultraviolet (EUV) lithography using a paraxial ray-tracing algorithm based on Seidel aberration theory is proposed. By tracing…

Optics · Physics 2022-03-07 Wei Tan , Donglin Ma

Deep Ultraviolet (DUV) Photolithography is currently used to fabricate mass-scale integrated circuits (ICs). Its high throughput and resolution could benefit large-scale RF MEMS production for the telecommunication market. We present a…

Systems and Control · Electrical Eng. & Systems 2024-07-23 Marco Liffredo , Federico Peretti , Nan Xu , Silvan Stettler , Luis Guillermo Villanueva

Electron beam lithography (EBL) is a promising maskless solution for the technology beyond 14nm logic node. To overcome its throughput limitation, industry has proposed character projection (CP) technique, where some complex shapes…

Other Computer Science · Computer Science 2015-02-04 Bei Yu , Kun Yuan , Jhih-Rong Gao , David Z. Pan

Digital micromirror devices are a popular type of spatial light modulators for wavefront shaping applications. While they offer several advantages when compared to liquid crystal modulators, such as polarization insensitivity and…

Optics · Physics 2023-11-29 R. Gutiérrez-Cuevas , S. M. Popoff

Atomic resolution imaging is key to understanding thin film growth and how a particular set of conditions influences properties. Whilst such imaging in the scanning transmission electron microscope (STEM) has had transformative impact in…

A central challenge in developing magnetically coupled quantum registers in diamond is the fabrication of nitrogen vacancy (NV) centers with localization below ~20 nm to enable fast dipolar interaction compared to the NV decoherence rate.…

The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D…

Mesoscale and Nanoscale Physics · Physics 2020-01-07 L. Skoric , D. Sanz-Hernández , F. Meng , C. Donnelly , S. Merino-Aceituno , A. Fernández-Pacheco

Nonlinear optics is essential for many recent photonic technologies. Here, we introduce a novel multi-scale approach to simulate the nonlinear optical response of molecular nanomaterials combining ab initio quantum-chemical and classical…

Nanostructured topological insulators (TIs) have the potential to impact a wide array of condensed matter physics topics, ranging from Majorana physics to spintronics. However, the most common TI materials, the Bi$_2$Se$_3$ family, are…

Ultracold atom-traps on a chip enhances the practical application of atom traps in quantum information processing, sensing, and metrology. Plasmon mediated near-field optical potentials are promising for trapping atoms. The combination of…

We present a combined experimental and theoretical study of enhanced third-harmonic generation (THG) in silicon nitride metasurfaces. These structures exhibit strong resonant nonlinear responses, enabling up to two orders of magnitude…

In optical imaging, achieving high resolution often comes at the expense of a shallow depth of field. This means that when using a standard microscope, any minor movement of the object along the optical axis can cause the image to become…