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This proposes a novel ensemble deep learning-based model to accurately classify, detect and localize different defect categories for aggressive pitches and thin resists (High NA applications).In particular, we train RetinaNet models using…

Image and Video Processing · Electrical Eng. & Systems 2022-06-29 Bappaditya Deya , Dipam Goswamif , Sandip Haldera , Kasem Khalilb , Philippe Leraya , Magdy A. Bayoumi

Traditional sheet metal forming relies on time-consuming and expensive Finite Element Analysis (FEA) for design validation, a process that significantly prolongs design cycles. While surrogate models offer faster iteration, current…

Machine Learning · Computer Science 2026-05-20 Jiajie Luo , Mohamed Mohamed , Osama Hassan , Haosu Zhou , Yingxue Zhao , Haoran Li , Xinrun Li , Zhutao Shao , Yang Long , Nan Li , Jichun Li

In the photolithographic process vital to semiconductor manufacturing, various types of defects appear during EUV pattering. Due to ever-shrinking pattern size, these defects are extremely small and cause false or missed detection during…

Accurate grain orientation mapping is essential for understanding and optimizing the performance of polycrystalline materials, particularly in energy-related applications. Lithium nickel oxide (LiNiO$_{2}$) is a promising cathode material…

Disordered Systems and Neural Networks · Physics 2025-11-26 Sebastian Wissel , Jonas Scheunert , Aaron Dextre , Shamail Ahmed , Andreas Bayer , Kerstin Volz , Bai-Xiang Xu

Next-generation particle accelerators demand advanced beam-diagnostic capabilities to ensure high performance, operational reliability, and sustainable machine operation. Increasing beam intensities and stored energies make the precise…

Accelerator Physics · Physics 2026-03-10 Francis René Osswald , Mohammed Chahbaoui , Xinyi Liang

Liquid metals (LM) are embedded in an elastomer matrix to obtain soft composites with unique thermal, dielectric, and mechanical properties. They have applications in soft robotics, biomedical engineering, and wearable electronics. By…

Materials Science · Physics 2025-07-25 Abhijith Thoopul Anantharanga , Mohammad Saber Hashemi , Azadeh Sheidaei

Most properties of solid materials are defined by their internal electric field and charge density distributions which so far are difficult to measure with high spatial resolution. Especially for 2D materials, the atomic electric fields…

The modeling of realistic magnetic materials requires the inclusion of defects. Based on the pseudospectral Landau-Lifshitz description of magnetisation dynamics, we propose a statistical model that takes into account defects, specifically…

Mesoscale and Nanoscale Physics · Physics 2026-03-12 C. Eagan , M. Copus , E. Iacocca

Diffusion in solids is a slow process that dictates rate-limiting processes in key chemical reactions. Unlike crystalline solids that offer well-defined diffusion pathways, the lack of similar structural motifs in amorphous or glassy…

Materials Science · Physics 2023-12-12 Ken-ichi Nomura , Ankit Mishra , Tian Sang , Rajiv K. Kalia , Aiichiro Nakano , Priya Vashishta

The response of materials to dynamical, or shock, loading is important to planetary science, aerospace engineering, and energetic materials. Thermal-activated processes, including chemical reactions and phase transitions, are significantly…

Materials Science · Physics 2023-03-31 Chunyu Li , Juan Carlos Verduzco , Brian H. Lee , Robert J. Appleton , Alejandro Strachan

Solute transport in fluid-particle systems is a fundamental process in numerous scientific and engineering disciplines. The simulation of it necessitates the consideration of solid particles with intricate shapes and sizes. To address this…

Computational Engineering, Finance, and Science · Computer Science 2023-08-10 Yifeng Zhao , Pei Zhang , Stan Z. Li , S. A. Galindo-Torres

Dataset distillation aims to distill the knowledge of a large-scale real dataset into small yet informative synthetic data such that a model trained on it performs as well as a model trained on the full dataset. Despite recent progress,…

Computer Vision and Pattern Recognition · Computer Science 2024-11-21 Ahmad Sajedi , Samir Khaki , Lucy Z. Liu , Ehsan Amjadian , Yuri A. Lawryshyn , Konstantinos N. Plataniotis

We present a new analysis method for atomic resolution four-dimensional scanning transmission electron microscopy (4D-STEM, in which a diffraction pattern is collected at each point of a raster scan of a focused electron beam across the…

Instrumentation and Detectors · Physics 2025-08-11 Yining Xie , Eoin Moynihan , Marin Alexe , Louis Piper , Ana Sanchez , Richard Beanland

Oxides exhibiting insulator-metal transitions are promising candidates for next generation ultrafast electronic switching devices. However, critical gaps remain in understanding the onset of strain and its dynamics as these materials…

Materials Science · Physics 2026-01-09 Arthur Niedermayr , Jianyu Wu , Bertina Fisher , Ido Kaminer , Jonas Weissenrieder

Implementation of a fast, robust, and fully-automated pipeline for crystal structure determination and underlying strain mapping for crystalline materials is important for many technological applications. Scanning electron nanodiffraction…

Deep learning is regarded as a promising solution for reversible steganography. There is an accelerating trend of representing a reversible steo-system by monolithic neural networks, which bypass intermediate operations in traditional…

Multimedia · Computer Science 2023-03-08 Ching-Chun Chang , Xu Wang , Sisheng Chen , Isao Echizen , Victor Sanchez , Chang-Tsun Li

The growing availability of the data collected from smart manufacturing is changing the paradigms of production monitoring and control. The increasing complexity and content of the wafer manufacturing process in addition to the time-varying…

Machine Learning · Computer Science 2021-11-16 Xiaoye Qian , Chao Zhang , Jaswanth Yella , Yu Huang , Ming-Chun Huang , Sthitie Bom

Atom segmentation and localization, noise reduction and deblurring of atomic-resolution scanning transmission electron microscopy (STEM) images with high precision and robustness is a challenging task. Although several conventional…

Materials Science · Physics 2021-02-23 Ruoqian Lin , Rui Zhang , Chunyang Wang , Xiao-Qing Yang , Huolin L. Xin

Deep learning has emerged as a technique of choice for rapid feature extraction across imaging disciplines, allowing rapid conversion of the data streams to spatial or spatiotemporal arrays of features of interest. However, applications of…

Data Analysis, Statistics and Probability · Physics 2021-01-25 Ayana Ghosh , Bobby G. Sumpter , Ondrej Dyck , Sergei V. Kalinin , Maxim Ziatdinov

Nowadays, modern electron microscopes deliver images at atomic scale. The precise atomic structure encodes information about material properties. Thus, an important ingredient in the image analysis is to locate the centers of the atoms…

Computer Vision and Pattern Recognition · Computer Science 2017-09-13 Benjamin Berkels , Benedikt Wirth
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