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The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended…

Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical (NEMS) devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a…

Mesoscale and Nanoscale Physics · Physics 2013-07-12 A. D. Smith , F. Niklaus , A. Paussa , S. Vaziri , A. C. Fischer , M. Sterner , F. Forsberg , A. Delin , D. Esseni , P. Palestri , M. Östling , M. C. Lemme

The tuning of electrical circuit resonance with a variable capacitor, or varactor, finds wide application with the most important being wireless telecommunication. We demonstrate an electromechanical graphene varactor, a variable capacitor…

Mesoscale and Nanoscale Physics · Physics 2016-10-25 M. AbdelGhany , F. Mahvash , M. Mukhopadhyay , A. Favron , R. Martel , M. Siaj , T. Szkopek

The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such…

Mesoscale and Nanoscale Physics · Physics 2017-11-17 Robin J. Dolleman , Dejan Davidovikj , Santiago J. Cartamil-Bueno , Herre S. J. van der Zant , Peter G. Steeneken

Semi-permeable membranes are important elements in water purification and energy generation applications, for which the atomic thickness and strength of graphene can enhance efficiency and permeation rate while maintaining good selectivity.…

Mesoscale and Nanoscale Physics · Physics 2020-09-09 Robin J. Dolleman , Allard J. Katan , Herre S. J. van der Zant , Peter G. Steeneken

In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…

Applied Physics · Physics 2019-08-29 Rishabh Bhooshan Mishra , S Santosh Kumar , Ravindra Mukhiya

Here, we present a micro-electromechanical system (MEMS) for the investigation of the electromechanical coupling in graphene and potentially related 2D materials. Key innovations of our technique include: (1) the integration of graphene…

The difficulty in determining the mass of a sample increases as its size diminishes. At the nanoscale, there are no direct methods for resolving the mass of single molecules or nanoparticles and so more sophisticated approaches based on…

Materials Science · Physics 2015-06-03 Stas M. Avdoshenko , Claudia Gomes da Rocha , Gianaurelio Cuniberti

The small mass and atomic-scale thickness of graphene membranes make them highly suitable for nanoelectromechanical devices such as e.g. mass sensors, high frequency resonators or memory elements. Although only atomically thick, many of the…

We report on the development of a pneumatically coupled graphene membrane system, comprising of two circular cavities connected by a narrow trench. Both cavities and the trench are covered by a thin few-layer graphene membrane to form a…

Flexible pressure sensors are an attractive area of research due to their potential applications in biomedical sensing and wearable devices. Among flexible and wearable pressure sensors, capacitive pressure sensors show significant…

Applied Physics · Physics 2021-11-12 Lekshmi A. Kurup , Cameron M. Cole , Joshua N. Arthur , Soniya D. Yambem

Suspended membranes of monoatomic graphene exhibit great potential for applications in electronic and nanoelectromechanical devices. In this work, a "hot and dry" transfer process is demonstrated to address the fabrication and patterning…

The enormous stiffness and low density of graphene make it an ideal material for nanoelectromechanical (NEMS) applications. We demonstrate fabrication and electrical readout of monolayer graphene resonators, and test their response to…

We study the mechanics of pressurized graphene membranes using an experimental configuration that allows the determination of the elasticity of graphene and the adhesion energy between a substrate and a graphene (or other two-dimensional…

Mesoscale and Nanoscale Physics · Physics 2017-08-23 Narasimha G. Boddeti , Steven P. Koenig , Rong Long , Jianliang Xiao , J. Scott Bunch , Martin L. Dunn

Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentally verified in graphene using uniaxial strain in graphene.…

The recent discovery of methods to isolate graphene, a one-atom-thick layer of crystalline carbon, has raised the possibility of a new class of nano-electronics devices based on the extraordinary electrical transport and unusual physical…

Mesoscale and Nanoscale Physics · Physics 2008-10-02 Xu Du , Ivan Skachko , Anthony Barker , Eva Y. Andrei

Straining graphene results in the appearance of a pseudo-magnetic field which alters its local electronic properties. Applying a pressure difference between the two sides of the membrane causes it to bend/bulge resulting in a resistance…

Mesoscale and Nanoscale Physics · Physics 2017-08-03 S. P. Milovanovic , M. Z. Tadic , F. M. Peeters

Isolated, atomically thin conducting membranes of graphite, called graphene, have recently been the subject of intense research with the hope that practical applications in fields ranging from electronics to energy science will emerge.…

Mesoscale and Nanoscale Physics · Physics 2010-09-17 S. Garaj , W. Hubbard , A. Reina , J. Kong , D. Branton , J. A. Golovchenko

Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS).…

Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform…

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