Related papers: Overlap junctions for high coherence superconducti…
We define superconducting constrictions by ploughing a deposited Aluminum film with a scanning probe microscope. The microscope tip is modified by electron beam deposition to form a nano-plough of diamond-like hardness, what allows the…
We combine electron beam lithography and masked anodization of epitaxial aluminium to define tunnel junctions via selective oxidation, alleviating the need for wet-etch processing or direct deposition of dielectric materials. Applying this…
Josephson Junctions are important components in superconducting qubits. It introduces anharmonicity to the energy level spacings of the qubit which allow us to identify two unique quantum energy states for computing. It is difficult to…
We describe fabrication and testing of composite flux qubits combining Nb- and Al-based superconducting circuit technology. This hybrid approach to making qubits allows for employing pi-phase shifters fabricated using well-established…
Quantum processing units (QPUs) based on superconducting Josephson junctions promise significant advances in quantum computing. However, they face critical challenges. Decoherence, scalability limitations, and error correction overhead…
Josephson junctions are key elements in superconducting electronics. The most common type is the overlap (sandwich-type) junction, formed by vertically stacking two superconducting layers. In contrast, planar junctions are fabricated…
We investigate a photolithography-only fabrication process for transmon Josephson junctions using a modified double-oblique evaporation geometry. Using a bilayer resist process and Al shadow evaporation, we fabricate junction structures and…
Reproducible high-Tc Josephson junctions have been made in a rather simple two-step process using ion irradiation. A microbridge (1 to 5 ?m wide) is firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7-? film through a gold mask…
Superconductor-Ferromagnet-Superconductor (S-F-S) Josephson junctions were fabricated by making a narrow cut through a S-F double layer using direct writing by Focused Ion Beam (FIB). Due to a high resolution (spot size smaller than 10 nm)…
The Josephson junction is the fundamental nonlinear building block of superconducting quantum technologies. Its macroscopic quantum tunneling physics underpins superconducting quantum computing, sensing, and communication, but scaling these…
We present a novel shadow evaporation technique for the realization of junctions and capacitors. The design by E-beam lithography of strongly asymmetric undercuts on a bilayer resist enables in-situ fabrication of junctions and capacitors…
Nb/Al_2O_3/Ni_{0.6}Cu_{0.4}/Nb based superconductor-insulator-ferromagnet-superconductor (SIFS) Josephson tunnel junctions with a thickness step in the metallic ferromagnetic \Ni_{0.6}\Cu_{0.4} interlayer were fabricated. The step was…
Superconducting qubit fabrication innovations continue to be explored to achieve higher performance. Despite improvements to base layer fabrication and processing, resist-based Josephson junction (JJ) schemes have largely remained…
Superinductances are superconducting circuit elements that combine a large inductance with a low parasitic capacitance to ground, resulting in a characteristic impedance exceeding the resistance quantum $R_Q = h/(2e)^2 \simeq 6.45…
We present a structure and a fabrication method for superconducting tunnel junctions down to the dimensions of 200 nm using i-line UV lithography. The key element is a side-wall-passivating spacer structure (SWAPS) which is shaped for…
We have developed a novel fabrication process for ultra-small, full-epitaxial NbN Josephson junctions on a silicon (Si) substrate. A full-epitaxial NbN/AlN/NbN tri-layer was grown on a Si (100) wafer with a (200)-oriented TiN buffer layer.…
Superconducting qubits are solid state electrical circuits fabricated using techniques borrowed from conventional integrated circuits. They are based on the Josephson tunnel junction, the only non-dissipative, strongly non-linear circuit…
Josephson junctions based on InAs semiconducting nanowires and Nb superconducting electrodes are fabricated in-situ by a special shadow evaporation scheme for the superconductor electrode. Compared to other metallic superconductors such as…
In this paper we present a method for processing a hybrid Josephson junction on Co-doped BaFe2As2(Ba-122) single crystals with a thin film Pb-counter electrode and a barrier layer of TiOx. This includes the leveling and polishing of the…
We present the fabrication and characterization of transmon qubits formed from aluminum Josephson junctions on two different silicon-based substrates: (i) high-resistivity silicon (Si) and (ii) silicon-on-insulator (SOI). Key to the qubit…