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Ultrathin dielectric tunneling barriers are critical to Josephson junction (JJ) based superconducting quantum bits (qubits). However, the prevailing technique of thermally oxidizing aluminum via oxygen diffusion produces problematic…

Atomic Layer Deposition (ALD) is a promising technique for producing Josephson junctions (JJs) with lower defect densities for qubit applications. A key problem with using ALD for JJs is the interfacial layer (IL) that develops underneath…

Superconductivity · Physics 2014-08-14 Alan J. Elliot , Chunrui Ma , Rongtao Lu , Melisa Xin , Siyuan Han , Judy Z. Wu , Ridwan Sakidja , Haifeng Yu

Atomic layer deposition (ALD) provides a promising approach for deposition of ultrathin low-defect-density tunnel barriers, and it has been implemented in a high-vacuum magnetron sputtering system for in situ deposition of ALD-Al2O3 tunnel…

Atomic Layer Deposition (ALD) is a promising technique for growing ultrathin, pristine dielectrics on metal substrates, which is essential to many electronic devices. Tunnel junctions are an excellent example which require a leak-free,…

Materials Science · Physics 2015-06-19 Alan J. Elliot , Gary A. Malek , Rongtao Lu , Siyuan Han , Haifeng Yiu , Shiping Zhao , Judy Z. Wu

We present a computational study of the adhesive and structural properties of the Al/Al2O3 interfaces as building blocks of the Metal-Insulator-Metal (MIM) tunnel devices, where electron transport is accomplished via tunnelling mechanism…

Mesoscale and Nanoscale Physics · Physics 2018-05-09 M. Koberidze , M. J. Puska , R. M. Nieminen

$Al/AlO_x/Al$-layer systems are frequently used for Josephson junction-based superconducting devices. Although much work has been devoted to the optimization of the superconducting properties of these devices, systematic studies on…

Materials Science · Physics 2020-01-07 S. Fritz , L. Radtke , R. Schneider , M. Weides , D. Gerthsen

The structural and nanochemical properties of thin $AlO_x$ layers are decisive for the performance of advanced electronic devices. For example, they are frequently used as tunnel barriers in Josephson junction-based superconducting devices.…

Materials Science · Physics 2019-11-27 S. Fritz , L. Radtke , R. Schneider , M. Luysberg , M. Weides , D. Gerthsen

A tunneling spectroscopy study is presented of superconducting MoN and Nb$_{0.8}$Ti$_{0.2}$N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV respectively with a corresponding…

High quality Nb-based superconductor-insulator-superconductor (SIS) junctions with Al oxide (AlO$_x$) tunnel barriers grown from Al overlayers are widely reported in the literature. However, the thin barriers required for high critical…

Approaches to developing large-scale superconducting quantum processors must cope with the numerous microscopic degrees of freedom that are ubiquitous in solid-state devices. State-of-the-art superconducting qubits employ aluminum oxide…

We have performed a detailed study of the time stability and reproducibility of sub-micron $Al/AlO_{x}/Al$ tunnel junctions, fabricated using standard double angle shadow evaporations. We have found that by aggressively cleaning the…

Mesoscale and Nanoscale Physics · Physics 2015-05-28 I. M. Pop , T. Fournier , T. Crozes , F. Lecocq , I. Matei , B. Pannetier , O. Buisson , W. Guichard

Sandwich-type MgB2 Josephson tunnel junctions (MgB2/AlOx/MgB2) have been fabricated using as-grown MgB2 films formed by molecular beam epitaxy. The junctions exhibited substantial supercurrent and a well-defined superconducting gap…

Superconductivity · Physics 2007-05-23 K. Ueda , S. Saito , K. Semba , T. Makimoto , M. Naito

We show that less than 10% of the barrier area dominates the electron tunneling in state-of-art Al/AlOx/Al Josephson junctions. They have been studied by transmission electron microscopy, specifically using atomic resolution annular dark…

Mesoscale and Nanoscale Physics · Physics 2015-11-16 L. J. Zeng , S. Nik , T. Greibe , C. M. Wilson , P. Delsing , E. Olsson

We tested oxidized titanium layers as barriers for hybrid Josephson junctions with high $I_cR_n$-products and for the preparation of junctions for tunneling spectroscopy. For that we firstly prepared junctions with conventional…

Aluminium oxide (AlO$_\mathrm{x}$) tunnel junctions are important components in a range of nanoelectric devices including superconducting qubits where they can be used as Josephson junctions. While many improvements in the reproducibility…

Mesoscale and Nanoscale Physics · Physics 2021-02-01 M. J. Cyster , J. S. Smith , N. Vogt , G. Opletal , S. P. Russo , J. H. Cole

Josephson junctions are the key components used in superconducting qubits for quantum computing. The advancement of quantum computing is limited by a lack of stability and reproducibility of qubits which ultimately originates in the…

Mesoscale and Nanoscale Physics · Physics 2024-06-26 K. Bayros , M. J. Cyster , J. S. Smith , J. H. Cole

We investigated electroforming-free bipolar resistive switching behavior in Pt/Ti/Al2O3/Al tunnel junctions where the Al2O3 tunnel barrier was naturally formed on Al in air. Various compliance current values for the junction's set switching…

Materials Science · Physics 2015-05-27 Doo Seok Jeong , Byung-ki Cheong , Hermann Kohlstedt

Micrometer-sized Al/AlO$_{x}$/Y tunnel junctions were fabricated by the electron-beam lithography technique. The thin ($\approx$ 1.5--2 nm thickness) insulating AlO$_{x}$ layer was grown on top of the Al base electrode by O$_{2}$ glow…

Mesoscale and Nanoscale Physics · Physics 2012-08-28 Yu-Ren Lai , Kai-Fu Yu , Yong-Han Lin , Jong-Ching Wu , Juhn-Jong Lin

Tunnel junctions are one of the key elements of chip-scale microsystems serving various technologies from classical microelectronics to quantum information. Aluminium and its oxide (AlOx) have dominated cryogenic tunnel junction technology…

We investigate how different interface geometries of an Al/Al$_2$O$_3$ junction, a common component of modern tunnel devices, affect electron transport through the tunnel barrier. We study six distinct Al/Al$_2$O$_3$ interfaces which differ…

Mesoscale and Nanoscale Physics · Physics 2016-03-23 M Koberidze , A V Feshchenko , M J Puska , R M Nieminen , J P Pekola
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