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Vertically aligned silicon micro/nanowire arrays of different sizes have been synthesized by combining the modified metal-assisted chemical etching (MACE) and reactive ion etching (RIE) methods. This is a novel lithography-free method to…

We report on self-assembled iron oxide nanoparticle films on silicon substrates. In addition to homogeneously assembled layers, we fabricated patterned trenches of 40-1000 nm width using electron beam lithography for the investigation of…

Mesoscale and Nanoscale Physics · Physics 2010-10-21 M. J. Benitez , P. Szary , D. Mishra , M. Feyen , A. H. Lu , O. Petracic , H. Zabel

We developed a process to fabricate nanoscale metallic gate electrodes on scanning probe cantilevers, including on the irregular surface of protruding cantilever tips. The process includes a floating-layer technique to coat the cantilevers…

Instrumentation and Detectors · Physics 2022-09-26 Luca Forrer , Aurèle Kamber , Armin Knoll , Martino Poggio , Floris Braakman

We have fabricated large arrays of mesoscopic metal rings on ultrasensitive cantilevers. The arrays are defined by electron beam lithography and contain up to $10^5$ rings. The rings have a circumference of 1 $\mu$m, and are made of…

Mesoscale and Nanoscale Physics · Physics 2015-06-19 D. Q. Ngo , I. Petkovic , A. Lollo , M. A. Castellanos-Beltran , J. G. E. Harris

We have fabricated disordered superconducting nanowires of molybdenium silicide. A molybdenium nanowire is first deposited on top of silicon, and the alloy is formed by rapid thermal annealing. The method allows tuning of the crystal growth…

Superconductivity · Physics 2017-12-06 J. S. Lehtinen , A. Kemppinen , E. Mykkänen , M. Prunnila , A. J. Manninen

We demonstrated the first-order interference between coherent light at 1580 nm and 795 nm by using frequency-domain Mach-Zehnder interferometer (MZI). The MZI is implemented by two frequency-domain BSs based on a second-order nonlinear…

This paper delivers the first report of a mid-infrared (MIR) waveguide array design that employs complementary and asymmetric tapered Euler-shaped bends. These provide greater fabrication flexibility to achieve subwavelength-pitch…

Mesoscale and Nanoscale Physics · Physics 2025-11-11 Humaira Zafar , Mauro Fernandes Pereira

We have fabricated the Bloch transistor shunted on-chip by a small-sized Cr resistor with Rs about 1 kOhm. The Bloch transistor normally consists of two small Josephson junctions connected in series, which in our case have been replaced by…

Mesoscale and Nanoscale Physics · Physics 2016-11-17 S. V. Lotkhov , H. Zangerle , A. B. Zorin , T. Weimann , H. Scherer , J. Niemeyer

We report a high-throughput and easy-to-implement approach to fabricate microchannels of nanocrystal superlattices with dimensions of ~4 micrometer^2, thus approaching the size of typical single-crystalline domains. By means of microcontact…

Applied Physics · Physics 2020-06-22 Andre Maier , Ronny Loeffler , Marcus Scheele

We report the fabrication of multi-island single-electron devices made by lithographic contacting of self-assembled alkanethiol-coated gold nanocrystals. The advantages of this method, which bridges the dimensional gap between lithographic…

Other Condensed Matter · Physics 2009-03-14 Dirk N. Weiss , Xavier Brokmann , Laurie E. Calvet , Marc A. Kastner , Moungi G. Bawendi

Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale…

Micro-electro mechanical systems (MEMS) thermal flow sensors are increasingly used for compact, low-power flow monitoring in biomedical applications. However, silicon-based method for sensor fabrication is limited by high cost, rigidity,…

Instrumentation and Detectors · Physics 2025-12-10 Mohammad Nizar Mohamed Zukri , Muhammad Salman Al Farisi , Yoshihiro Hasegawa , Mitsuhiro Shikida

We theoretically study a current switch that exploits the phase acquired by a charge carrier as it tunnels through a potential barrier in graphene. The system acts as an interferometer based on an armchair graphene quantum ring, where the…

Mesoscale and Nanoscale Physics · Physics 2017-02-03 D. J. P. de Sousa , Andrey Chaves , J. M. Pereira , G. A. Farias

We report the first successful operation of a neutron interferometer having a separate beam recombining crystal. We achieved this result at the neutron interferometry setup S18 at the ILL in Grenoble by a collaboration between TU Wien, ILL…

Instrumentation and Detectors · Physics 2022-07-29 Hartmut Lemmel , Michael Jentschel , Hartmut Abele , Fabien Lafont , Bruno Guerard , Carlo P. Sasso , Giovanni Mana , Enrico Massa

In this paper, we report high-precision absolute distance and vibration measurements performed with frequency scanned interferometry. Absolute distance was determined by counting the interference fringes produced while scanning the laser…

Instrumentation and Detectors · Physics 2011-09-13 Hai-Jun Yang , Tianxiang Chen , Keith Riles

We report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 Michelle D. Chabot , John M. Moreland , Lan Gao , Sy-Hwang Liou , Casey W. Miller

We have performed thermal conductance measurements on individual single crystalline silicon suspended nanowires. The nanowires (130 nm thick and 200 nm wide) are fabricated by e-beam lithography and suspended between two separated pads on…

Mesoscale and Nanoscale Physics · Physics 2015-06-25 Olivier Bourgeois , T. Fournier , J. Chaussy

We integrate about 100 single Cadmium Selenide semiconductor nanowires in self-standing Silicon Nitride photonic crystal cavities in a single processing run. Room temperature measurements reveal a single narrow emission linewidth,…

We describe a novel monolithic ion trap that combines the flexibility and scalability of silicon microfabrication technologies with the superior trapping characteristics of traditional four-rod Paul traps. The performace of the proposed…

A monolithic silicon pixel prototype produced for the MONOLITH ERC Advanced project was irradiated with 70 MeV protons up to a fluence of 1 x 10^16 1 MeV n_eq/cm^2. The ASIC contains a matrix of hexagonal pixels with 100 {\mu}m pitch,…