Related papers: Electromagnetic Effects in Capacitively Coupled Pl…
A self-consistent particle-in-cell simulation study is performed to investigate the effect of driving frequency on the electric field non-linearity, electron heating mechanism and electron energy distribution function (EEDF) in a low…
It was aimed to determine whether plasma processing could contribute to enhanced capacitance and energy density of activated carbon electrode based electrochemical capacitors, through the formation of additional surface charges. While an…
External matching networks are crucial and necessary for operating capacitively coupled plasmas in order to maximize the absorbed power. Experiments show that external circuits in general heavily interact with the plasma in a nonlinear way.…
We proposed an altered configuration for dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two rf sources. With…
The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device under varying applied RF voltages and driving frequencies are studied using particle-in-cell/Monte Carlo collision simulations. An…
This work investigates the discharge properties of a cylindrical magnetized capacitive coupled plasma discharge produced between a pair of coaxial cylinders. For the purpose of diagnosing plasma properties and electron energy distribution…
In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms, as a function of the electrode…
In this study we report the effects of an external electromagnetic field on the collective properties of unmagnetized plasmas. The calculations are carried out in the semi-classical approximation, i.e., the electromagnetic field is treated…
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron power absorption and excitation/ionization dynamics in…
Very large DC and AC electric fields cannot be sustained between conducting electrodes because of volume gas breakdown and/or surface field emission. However, very large potential fields are now routinely generated in plasma structures such…
Hot plasma is highly conductive in the direction parallel to a magnetic field. This often means that the electrical potential will be nearly constant along any given field line. When this is the case, the cross-field voltage drops in…
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investigated. The device in focus is a geometrically asymmetric…
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very high frequency capacitively coupled plasma (CCP) excited by a…
Capacitively coupled radio-frequency (CCRF) CF_4 plasmas have been found to exhibit a self-organized striated structure at operating conditions, where the plasma is strongly electronegative and the ion-ion plasma in the bulk region (largely…
The electromagnetic modes possibly unstable in strongly magnetized plasmas are identified. The regime where this instability might stand out compared to the incoherent electron-cyclotron radiation is explored. These modes are relevant to…
Radiofrequency capacitively coupled plasma is studied theoretically using a Particle-in-Cell code. For He discharge, the time-averaged sheaths are in the range of few centimeters. The sheath potential, ion, and electron energy and angular…
Studies of charge-charge (ion-ion, ion-electron, and electron-electron) coupling properties for ion impurities in an electron gas and for a two component plasma are carried out on the basis of a regularized electron-ion potential without…
Renormalization of the Coulomb interaction in layered metals results in a strongly anisotropic plasma mode with low frequencies for small components of wave vector in the in-plane direction. Interaction of electrons with this mode was found…
This paper addresses different aspects of "coupled" model descriptions in computational electromagnetics. This includes domain decomposition, multiscale problems, multiple or hybrid discrete field formulation and multi-physics problems.…
The importance of accounting for an ambipolar electrostatic potential or a non-uniform density profile for modelling of inductively coupled discharges is demonstrated. A drastic enhancement is observed of the power transfer into plasma for…