Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma
Plasma Physics
2017-01-24 v1 Computational Physics
Abstract
We proposed an altered configuration for dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two rf sources. With Particle-in-cell/Monte Carlo method, we have demonstrated this configuration can remove the harmful electromagnetic and DF coupling effects in conventional DF-CCP.
Cite
@article{arxiv.0912.5129,
title = {Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma},
author = {Hongyu Wang and Wei Jiang and Zhenhua Bi and Younian Wang},
journal= {arXiv preprint arXiv:0912.5129},
year = {2017}
}
Comments
submitted to Applied Physics Letters