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We present our current progress on the design and test of Ti/TiN Multilayer for use in Kinetic Inductance Detectors (KIDs). Sensors based on sub-stoichiometric TiN film are commonly used in several applications. However, it is difficult to…

Microwave Kinetic Inductance Detectors (MKIDs) are a class of superconducting cryogenic detectors that simultaneously exhibit energy resolution, time resolution and spatial resolution. The pixel yield of MKID arrays is usually a critical…

Instrumentation and Methods for Astrophysics · Physics 2023-01-20 Mario De Lucia , E. Baldwin , G. Ulbricht , J. D. Piercy , O. Creaner , C. Bracken , T. P. Ray

We demonstrate photon-noise limited performance at sub-millimeter wavelengths in feedhorn-coupled, microwave kinetic inductance detectors (MKIDs) made of a TiN/Ti/TiN trilayer superconducting film, tuned to have a transition temperature of…

Superconducting thin films with high intrinsic kinetic inductance $L_{k}$ are important for high-sensitivity detectors, enabling strong coupling in hybrid quantum systems, and enhancing nonlinearities in quantum devices. We report the…

Future actively cooled space-borne observatories for the far-infrared, loosely defined as a 1--10 THz band, can potentially reach a sensitivity limited only by background radiation from the Universe. This will result in an increase in…

Instrumentation and Methods for Astrophysics · Physics 2022-09-07 J. J. A. Baselmans , F. Facchin , A. Pascual Laguna , J. Bueno , D. J. Thoen , V. Murugesan , N. Llombart , P. de Visser

To use highly resistive material for Kinetic Inductance Detectors (KID), new designs have to be done, in part due to the impedance match needed between the KID chip and the whole 50 ohms readout circuit. Chips from two new hybrid designs,…

Instrumentation and Methods for Astrophysics · Physics 2013-09-18 P. Diener , H. G. Leduc , S. J. C. Yates , Y. J. Y. Lankwarden , J. J. A. Baselmans

The non-homogeneity in the critical temperature $T_{c}$ of an Microwave Kinetic Inductance Detector (MKID) could be caused by non-uniformity in the deposition process of the thin superconducting film. This produces low percent yield and…

Instrumentation and Detectors · Physics 2019-11-18 Israel Hernandez , Martin Makler , Juan Estrada , Clecio R. Bom , Donna Kubik , Julian Amette , Jorge Montes , Andrew Leptop

We have fabricated and characterized 10,000 and 20,440 pixel Microwave Kinetic Inductance Detector (MKID) arrays for the Dark-speckle Near-IR Energy-resolved Superconducting Spectrophotometer (DARKNESS) and the MKID Exoplanet Camera (MEC).…

Instrumentation and Methods for Astrophysics · Physics 2017-11-06 P. Szypryt , S. R. Meeker , G. Coiffard , N. Fruitwala , B. Bumble , G. Ulbricht , A. B. Walter , M. Daal , C. Bockstiegel , G. Collura , N. Zobrist , I. Lipartito , B. A. Mazin

We have fabricated 2024 pixel microwave kinetic inductance detector (MKID) arrays in the ultraviolet/optical/near-IR (UVOIR) regime that are currently in use in astronomical instruments. In order to make MKIDs desirable for novel…

Instrumentation and Detectors · Physics 2017-11-23 P. Szypryt , B. A. Mazin , B. Bumble , H. G. Leduc , L. Baker

We present a design for an array of kinetic inductance detectors (KIDs) integrated with phased array antennas for imaging at 150 GHz under high background conditions. The microstrip geometry KID detectors are projected to achieve photon…

Instrumentation and Methods for Astrophysics · Physics 2022-05-26 Shibo Shu , Jack Sayers , Peter K. Day

We have fabricated an array of subgap kinetic inductance detectors (SKIDs) made of granular aluminum ($T_c\sim$2~K) sensitive in the 80-90 GHz frequency band and operating at 300~mK. We measure a noise equivalent power of…

Instrumentation and Detectors · Physics 2021-04-07 F. Levy-Bertrand , A. Benoît , O. Bourrion , M. Calvo , A. Catalano , J. Goupy , F. Valenti , N. Maleeva , L. Grünhaupt , I. M. Pop , A. Monfardini

Titanium nitride (TiN) presents superior electrical conductivity with mechanical and chemical stability and compatibility with the semiconductor fabrication process. Here, we fabricated epitaxial and polycrystalline TiN (111) thin films on…

Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, \rho_n ~ 100 $\mu$Ohm cm,…

Microwave Kinetic Inductance Detectors, or MKIDs, are a type of low temperature detector that exhibit intrinsic frequency domain multiplexing at microwave frequencies. We present the first theory and measurements on a MKID based on a…

Superconductivity · Physics 2010-07-07 B. A. Mazin , D. Sank , S. McHugh , E. A. Lucero , A. Merrill , J. Gao , D. Pappas , D. Moore , J. Zmuidzinas

SpectroPhotometric Imaging in Astronomy with Kinetic Inductance Detectors (SPIAKID) aims at designing, building, and deploying on the sky a spectrophotometric imager based on microwave kinetic inductance detectors (MKIDs) in the optical and…

We report on the design and performance of Microwave Kinetic Inductance Detectors (MKIDs) sensitive to single photons in the optical to near-infrared range using hafnium as the sensor material. Our test device had a superconducting…

Microwave Kinetic Inductance Detectors (MKIDs) provide highly multiplexed arrays of detectors that can be configured to operate from the sub-millimeter to the X-ray regime. We have examined two tungsten silicide alloys (W5Si3 and WSi2),…

We apply the superconducting proximity effect in TiN/Ti multi-layer films to tune the critical temperature, Tc, to within 10 mK with high uniformity (less than 15 mK spread) across a 75 mm wafer. Reproducible Tc's are obtained from 0.8 -…

We demonstrate photon counting at 1550 nm wavelength using microwave kinetic inductance detectors (MKIDs) made from TiN/Ti/TiN trilayer films with superconducting transition temperature Tc ~ 1.4 K. The detectors have a lumped-element design…

Instrumentation and Detectors · Physics 2017-06-07 W. Guo , X. Liu , Y. Wang , Q. Wei , L. F. Wei , J. Hubmayr , J. Fowler , J. Ullom , L. Vale , M. R. Vissers , J. Gao

We report on the development of Microwave Kinetic Inductance Detectors (MKIDs) using platinum silicide as the sensor material. MKIDs are an emerging superconducting detector technology, capable of measuring the arrival times of single…

Instrumentation and Detectors · Physics 2016-10-14 P. Szypryt , B. A. Mazin , G. Ulbricht , B. Bumble , S. R. Meeker , C. Bockstiegel , A. B. Walter
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