Related papers: Improved Sputter Depth Resolution in Auger Thin Fi…
Depth profiling of thin films by inert gas sputtering is one of the most important applications of Auger electron spectroscopy and X-ray photoelectron spectroscopy. Such an analysis monitors the elemental in-depth composition of the thin…
Auger analysis of high-aspect ratio contact holes of integrated microelectronic devices is a challenging analytical task. Due to geometrical shadowing the primary electron beam and the energy analyser have not the required direct line of…
Low-angle cross sections are produced inside an Auger microprobe using the equipped depth profile ion sputter gun. Simply the sample is partly covered by a mask. Utilizing the edge of this mask the sample is sputtered with ions. Due to the…
The authors report in situ Auger electron spectroscopy (AES) of the surfaces of complex oxides thin films grown by pulsed laser deposition (PLD). The authors demonstrate the utility of the technique in studying chemical composition by…
Thin film systems are often analysed by using sputter depth profiling. First the sample gets eroded by inert gas ion impact during sputter depth profiling. Then the elemental composition of the freshly unveiled surface is determined by…
Quantification of sputter depth profiles is frequently done by fitting the convolution integral over concentration and depth resolution function. For a thin delta layer, there exist analytical solutions. The analytical depth resolution…
Auger parameter analysis provides in-depth information about the electronic and chemical bonding properties of TiN and AlN thin films, which are relevant across a wide range of technologies. Meaningful interpretation and analysis of the…
Often a surface sensitive analytical technique in combination with sample erosion by inert ion sputtering is used for compositional in-depth analysis of solid state samples. Layer by layer the sample gets eroded and then the composition of…
Grazing incidence x-ray scattering provides nanostructural information for thin film samples, but single images generally do not provide information on film thickness or the full complex index of refraction. Additionally, for thin films…
A new experimental equipment allowing to study the sputtering induced by ion beam irradiation is presented. The sputtered particles are collected on a catcher which is analyzed in situ by Auger electron spectroscopy without breaking the…
We report on thin-film processing improvements in the fabrication of superconducting quasiparticle-trap-assisted electrothermal-feedback transition-edge sensors (QETs) used in the design of Cryogenic Dark Matter Search (CDMS) detectors. The…
Boundary detection of irregular and translucent objects is an important problem with applications in medical imaging, environmental monitoring and manufacturing, where many of these applications are plagued with scarce labeled data and low…
New developments in quantitative sputter depth profiling during the past ten years are reviewed, with special emphasis on the experimental achievement of ultrahigh depth resolution (below 2 nm for sputtered depths larger than 10 nm). In…
This work discusses an extension to conventional low-coherence interferometry by the introduction of dispersion-encoding. The extension facilitates the measurement of surface height profiles with sub-nm resolution. The selection of a…
With the growing amount of astronomical data, there is an increasing need for automated data processing pipelines, which can extract scientific information from observation data without human interventions. A critical aspect of these…
We present a concept of the X-ray imaging system with high angular-resolution and moderate sensitivity. In this concept, a two-dimensional detector, i.e., imager, is put at a slightly out-of-focused position of the focusing mirror, rather…
In this paper we report on the development and performance of a cylindrical mirror analyser electron spectrometer for ion atom collision experiments. A low cost data acquisition system using Arduino microcontroller has also been developed…
The overall quality of multilayer thin films prepared by electrodeposition is strongly influenced by the surface and interface roughness which increases with the layer number. For that very reason the reliable analysis of the first few…
Understanding and controlling the chemical states both in the bulk and at the interfaces of complex oxide thin films is essential for engineering a wide range of electronic, optical, and magnetic functionalities, which arise through…
Estimating depth from images nowadays yields outstanding results, both in terms of in-domain accuracy and generalization. However, we identify two main challenges that remain open in this field: dealing with non-Lambertian materials and…