Related papers: Si$_3$N$_4$ nanobeam optomechanical crystals
Wavelength-scale, high Q-factor photonic crystal cavities have emerged as a platform of choice for on-chip manipulation of optical signals, with applications ranging from low-power optical signal processing and cavity quantum…
A two-dimensional photonic crystal microcavity design supporting a wavelength-scale volume resonant mode with a calculated quality factor (Q) insensitive to deviations in the cavity geometry at the level of Q~2x10^4 is presented. The…
Silicon carbide (SiC) has great potential for optomechanical applications due to its outstanding optical and mechanical properties. However, challenges associated with SiC nanofabrication have constrained its adoption in optomechanical…
On-chip optical resonators have the promise of revolutionizing numerous fields including metrology and sensing; however, their optical losses have always lagged behind their larger discrete resonator counterparts based on crystalline…
Interaction between light and high-frequency sound is a key area in integrated photonics, quantum and nonlinear optics, and quantum science. However, the typical suspended optomechanical structures suffer from poor thermal anchoring, making…
We present the fabrication and characterization of an artificial crystal structure formed from a thin-film of silicon which has a full phononic bandgap for microwave X-band phonons and a two-dimensional pseudo-bandgap for near-infrared…
We present optical sideband spectroscopy measurements of a mesoscopic mechanical oscillator cooled near its quantum ground state. The mechanical oscillator, corresponding to a 3.99GHz acoustic mode of a patterned silicon nanobeam, is…
Gallium phosphide offers an attractive combination of a high refractive index ($n>3$ for vacuum wavelengths up to 4 {\mu}m) and a wide electronic bandgap (2.26 eV), enabling optical cavities with small mode volumes and low two-photon…
We describe a cryogenic cavity-optomechanical system that combines Si3N4 membranes with a mechanically-rigid Fabry-Perot cavity. The extremely high quality-factor frequency products of the membranes allow us to cool a MHz mechanical mode to…
Observation of quantum phenomena in cryogenic, optically cooled mechanical resonators has been recently achieved by a few experiments based on cavity optomechanics. A well-established experimental platform is based on a thin film…
We propose and experimentally demonstrate a photonic crystal nanocavity with multiple resonances that can be tuned nearly independently. The design is composed of two orthogonal intersecting nanobeam cavities. Experimentally, we measure…
We experimentally study the dispersion relation of waves in a two-dimensional (2D) defect layer with periodic nanopores that sits on a three-dimensional (3D) photonic band gap crystal made from silicon by CMOS-compatible methods. The…
Photonic crystal (PhC) membranes patterned with sub-wavelength periods offer a unique combination of high reflectivity, low mass, and high mechanical quality factor. We demonstrate a PhC membrane that we use as one mirror of a Fabry-Perot…
Material absorption is a key limitation in nanophotonic systems; however, its characterization is often obscured by scattering and diffraction loss. Here we show that nanomechanical frequency spectroscopy can be used to characterize the…
We present a simple fabrication method for the realization of suspended GaAs nanomembranes for cavity quantum optomechanics experiments. GaAs nanomembranes with an area of 1.36 mm by 1.91 mm and a thickness of 160 nm are obtained by using a…
We demonstrate high optical quality factors in aluminum nitride (AlN) photonic crystal nanobeam cavities. Suspended AlN photonic crystal nanobeams are fabricated in sputter-deposited AlN-on-insulator substrates using a self-protecting…
Optomechanical systems offer new opportunities in quantum information processing and quantum sensing. Many solid-state quantum devices operate at millikelvin temperatures -- however, it has proven challenging to operate nanoscale…
An optomechanical microcavity can considerably enhance the interaction between light and mechanical motion by confining light to a sub-wavelength volume. However, this comes at the cost of an increased optical loss rate. Therefore,…
We describe the strong optomechanical dynamical interactions in ultrahigh-Q/V slot-type photonic crystal cavities. The dispersive coupling is based on a mode-gap photonic crystal cavities with light localization in an air mode with…
Using light to measure an object's motion is central to operating mechanical sensors that probe forces and fields. Cavity optomechanical systems embed mechanical resonators inside optical resonators. This enhances the sensitivity of…