High-Q aluminum nitride photonic crystal nanobeam cavities
Optics
2012-06-13 v1
Abstract
We demonstrate high optical quality factors in aluminum nitride (AlN) photonic crystal nanobeam cavities. Suspended AlN photonic crystal nanobeams are fabricated in sputter-deposited AlN-on-insulator substrates using a self-protecting release process. Employing one-dimensional photonic crystal cavities coupled to integrated optical circuits we measure quality factors up to 146,000. By varying the waveguide-cavity coupling gap, extinction ratios in excess of 15 dB are obtained. Our results open the door for integrated photonic bandgap structures made from a low loss, wide-transparency, nonlinear optical material system.
Keywords
Cite
@article{arxiv.1205.1405,
title = {High-Q aluminum nitride photonic crystal nanobeam cavities},
author = {W. H. P. Pernice and C. Xiong and C. Schuck and H. X. Tang},
journal= {arXiv preprint arXiv:1205.1405},
year = {2012}
}