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Elastic dissipation through radiation towards the substrate is a major loss channel in micro- and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of…

Mechanical dissipation poses an ubiquitous challenge to the performance of nanomechanical devices. Here we analyze the support-induced dissipation of high-stress nanomechanical resonators. We develop a model for this loss mechanism and test…

Mesoscale and Nanoscale Physics · Physics 2011-03-28 I. Wilson-Rae , R. A. Barton , S. S. Verbridge , D. R. Southworth , B. Ilic , H. G. Craighead , J. M. Parpia

All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…

Mesoscale and Nanoscale Physics · Physics 2016-04-07 Richard A. Norte , Joao P. Moura , Simon Gröblacher

Cavity-enhanced radiation-pressure coupling of optical and mechanical degrees of freedom gives rise to a range of optomechanical phenomena, in particular providing a route to the quantum regime of mesoscopic mechanical oscillators. A prime…

Quantum Physics · Physics 2008-07-18 G. Anetsberger , R. Rivière , A. Schliesser , O. Arcizet , T. J. Kippenberg

Mechanical resonators made with monolithic piezoelectric quartz crystals are promising for studying new physical phenomena. High mechanical quality factors ($Q$) exhibited by the mm-sized quartz resonators make them ideal for studying weak…

Applied Physics · Physics 2018-06-21 Alpo Valimaa , Jorge Santos , Caspar Ockeloen-Korppi , Mika Sillanpaa

Silicon nitride (SiN) micro- and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors ($Q$s). Despite their popularity, the origin of the limiting loss…

Mesoscale and Nanoscale Physics · Physics 2017-10-18 Luis Guillermo Villanueva , Silvan Schmid

We study the optomechanical properties of stoichiometric SiN resonators through a combination of spectroscopic and interferometric imaging techniques. At room temperature, we demonstrate ultrahigh quality factors of $5 \times 10^7$ and a $f…

Mesoscale and Nanoscale Physics · Physics 2015-06-17 S. Chakram , Y. S. Patil , L. Chang , M. Vengalattore

Studying the interplay between multiple coupled mechanical resonators is a promising new direction in the field of optomechanics. Understanding the dynamics of the interaction can lead to rich new effects, such as enhanced coupling and…

Observation of quantum phenomena in cryogenic, optically cooled mechanical resonators has been recently achieved by a few experiments based on cavity optomechanics. A well-established experimental platform is based on a thin film…

We develop a stoichiometric SiN membrane-based optoelectromechanical system, in which the properties of the mechanical resonator can be dynamically controlled by the piezoelectric actuation. The mode splitting is observed in the mechanical…

Applied Physics · Physics 2018-10-04 Shuhui Wu , Jiteng Sheng , Xiaotian Zhang , Yuelong Wu , Haibin Wu

We report disk-shaped silicon optomechanical resonators with frequency up to 1.75 GHz in the ultrahigh frequency band. Optical transduction of the thermal motion of the disks' in-plane vibrational modes yields a displacement sensitivity of…

Optics · Physics 2012-06-20 Xiankai Sun , Xufeng Zhang , Hong X. Tang

High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…

Mesoscale and Nanoscale Physics · Physics 2016-03-07 A. H. Ghadimi , D. J. Wilson , T. J. Kippenberg

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane,…

Mesoscale and Nanoscale Physics · Physics 2016-09-14 A. Borrielli , L. Marconi , F. Marin , F. Marino , B. Morana , G. Pandraud , A. Pontin , G. A. Prodi , P. M. Sarro , E. Serra , M. Bonaldi

We numerically and experimentally investigate the phononic loss for superconducting resonators fabricated on a piezoelectric substrate. With the help of finite element method simulations, we calculate the energy loss due to…

Mesoscale and Nanoscale Physics · Physics 2020-06-24 Marco Scigliuzzo , Laure E. Bruhat , Andreas Bengtsson , Jonathan J. Burnett , Anita Fadavi Roudsari , Per Delsing

Electromagnetic resonators are a versatile platform to harvest, filter and trap electromagnetic energy, at the basis of many applications from microwaves to optics. Resonators with a large intrinsic quality factor (Q) are highly desirable…

Optics · Physics 2020-02-04 Younes Radi , Alex Krasnok , Andrea Alú

We characterize the mechanical quality factor of micro-oscillators covered by a highly reflective coating. We test an approach to the reduction of mechanical losses, that consists in limiting the size of the coated area to reduce the strain…

Optics · Physics 2012-08-27 E. Serra , F. S. Cataliotti , F. Marin , F. Marino , A. Pontin , G. A. Prodi , M. Bonaldi

The quality factor of a mechanical resonator is an important figure of merit for various sensing applications and for observing quantum behavior. Here, we demonstrate a technique to push the quality factor of a micro-mechanical resonator…

Mesoscale and Nanoscale Physics · Physics 2012-05-29 K. -K. Ni , R. Norte , D. J. Wilson , J. D. Hood , D. E. Chang , O. Painter , H. J. Kimble

State of the art nanomechanical resonators present quality factors Q ~ 10^3 - 10^5, which are much lower than those that can be naively extrapolated from the behavior of micromechanical resonators. We analyze the dissipation mechanism that…

Mesoscale and Nanoscale Physics · Physics 2009-09-04 I. Wilson-Rae

A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many…

Fluid Dynamics · Physics 2012-06-04 Santhosh D. Vishwakarma , A. K. Pandey , J. M. Parpia , R. Pratap

High-\Qm{} mechanical resonators are crucial for applications where low noise and long coherence time are required, as mirror suspensions, quantum cavity optomechanical devices, or nanomechanical sensors. Tensile strain in the material…

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