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The dynamics of a free boundary problem for electrostatically actuated microelectromechanical systems (MEMS) is investigated. The model couples the electric potential to the deformation of the membrane, the deflection of the membrane being…

Analysis of PDEs · Mathematics 2013-02-26 Joachim Escher , Philippe Laurencot , Christoph Walker

The evolution problem for a membrane based model of an electrostatically actuated microelectromechanical system (MEMS) is studied. The model describes the dynamics of the membrane displacement and the electric potential. The latter is a…

Analysis of PDEs · Mathematics 2012-11-27 Joachim Escher , Philippe Laurencot , Christoph Walker

The dynamical and stationary behaviors of a fourth-order evolution equation with clamped boundary conditions and a singular nonlocal reaction term, which is coupled to an elliptic free boundary problem on a non-smooth domain, are…

Analysis of PDEs · Mathematics 2013-08-29 Philippe Laurencot , Christoph Walker

An idealized electrostatically actuated microelectromechanical system (MEMS) involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution…

Analysis of PDEs · Mathematics 2017-07-06 Philippe Laurencot , Christoph Walker

A free boundary problem describing small deformations in a membrane based model of electrostatically actuated MEMS is investigated. The existence of stationary solutions is established for small voltage values. A justification of the widely…

Analysis of PDEs · Mathematics 2013-01-28 Philippe Laurencot , Christoph Walker

We consider the dynamics of an electrostatically actuated thin elastic plate being clamped at its boundary above a rigid plate. The model includes the harmonic electrostatic potential in the three-dimensional time-varying region between the…

Analysis of PDEs · Mathematics 2015-06-02 Philippe Laurencot , Christoph Walker

A stationary free boundary problem modeling a three-dimensional electrostatic MEMS device is investigated. The device is made of a rigid ground plate and an elastic top plate which is hinged at its boundary, the plates being held at…

Analysis of PDEs · Mathematics 2021-03-12 Katerina Nik

A variational approach is employed to find stationary solutions to a free boundary problem modeling an idealized electrostatically actuated MEMS device made of an elastic plate coated with a thin dielectric film and suspended above a rigid…

Analysis of PDEs · Mathematics 2014-09-10 Philippe Laurencot , Christoph Walker

A parabolic free boundary problem modeling a three-dimensional electrostatic MEMS device is investigated. The device is made of a rigid ground plate and an elastic top plate which is hinged at its boundary, the plates being held at…

Analysis of PDEs · Mathematics 2021-03-12 Katerina Nik

We discuss an evolution free boundary problem of mixed type with two free boundaries modeling an idealized electrostatically actuated MEMS device. While the electric potential is the solution of an elliptic equation, the dynamics of the…

Analysis of PDEs · Mathematics 2015-08-11 Martin Kohlmann

A free boundary problem modeling a microelectromechanical system (MEMS) consisting of a fixed ground plate and a deformable top plate is considered, the plates being held at different electrostatic potentials. It couples a second order…

Analysis of PDEs · Mathematics 2016-12-20 Philippe Laurençot , Christoph Walker

A two-dimensional free boundary transmission problem arising in the modeling of an electrostatically actuated plate is considered and a representation formula for the derivative of the associated electrostatic energy with respect to the…

Analysis of PDEs · Mathematics 2022-02-22 Philippe Laurençot , Christoph Walker

A moving boundary problem with two free boundaries modeling a two-dimensional idealized MEMS device with pull-in instability is discussed. We use a fixed point argument to show that the model possesses stationary solutions for small source…

Analysis of PDEs · Mathematics 2014-07-15 Martin Kohlmann

The objective of our paper is to investigate fractional elliptic equations of the form $(-\Delta)^s u=\frac{\lambda }{(a-u)^2}$ within a bounded domain $\Omega$, subject to zero Dirichlet boundary conditions. Here, $s\in(0,1)$, $\lambda>0$,…

Analysis of PDEs · Mathematics 2026-02-17 Huyuan Chen , Jialei Jiang , Jun Wang

The mechanical process of progressively debonding an adhesive membrane from a substrate is described as a quasistatic variational evolution of sets and herein investigated. Existence of energetic solutions, based on global minimisers of a…

Analysis of PDEs · Mathematics 2025-03-24 Eleonora Maggiorelli , Filippo Riva , Edoardo Giovanni Tolotti

We consider a free boundary problem modeling electrostatic microelectromechanical systems. The model consists of a fourth-order damped wave equation for the elastic plate displacement which is coupled to an elliptic equation for the…

Analysis of PDEs · Mathematics 2014-04-28 Philippe Laurencot , Christoph Walker

Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…

Computational Physics · Physics 2007-05-23 N. Majumdar , S. Mukhopadhyay

We study a nonlinear wave equation appearing as a model for a membrane (without viscous effects) under the presence of an electrostatic potential with strength $\lambda$. The membrane has a unique stable branch of steady states…

Analysis of PDEs · Mathematics 2020-12-16 Carlos García-Azpeitia , Jean-Philippe Lessard

Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures (plates or array of thin beams) with cross-sections of the order of microns and lengths of the order of tens or hundreds of microns. Electrostatic forces play…

Computational Physics · Physics 2007-05-23 N. Majumdar , S. Mukhopadhyay

We report on low temperature measurements performed on micro-electro-mechanical systems (MEMS) driven deeply into the non-linear regime. The materials are kept in their elastic domain, while the observed non-linearity is purely of…

Mesoscale and Nanoscale Physics · Physics 2015-06-18 Eddy Collin , Yuriy M. Bunkov , Henri Godfrin
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