A stationary free boundary problem modeling electrostatic MEMS
Analysis of PDEs
2013-01-28 v1
Abstract
A free boundary problem describing small deformations in a membrane based model of electrostatically actuated MEMS is investigated. The existence of stationary solutions is established for small voltage values. A justification of the widely studied narrow-gap model is given by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.
Cite
@article{arxiv.1111.1156,
title = {A stationary free boundary problem modeling electrostatic MEMS},
author = {Philippe Laurencot and Christoph Walker},
journal= {arXiv preprint arXiv:1111.1156},
year = {2013}
}