Related papers: Critical Temperature tuning of Ti/TiN multilayer f…
We apply the superconducting proximity effect in TiN/Ti multi-layer films to tune the critical temperature, Tc, to within 10 mK with high uniformity (less than 15 mK spread) across a 75 mm wafer. Reproducible Tc's are obtained from 0.8 -…
Superconducting thin films with high intrinsic kinetic inductance $L_{k}$ are important for high-sensitivity detectors, enabling strong coupling in hybrid quantum systems, and enhancing nonlinearities in quantum devices. We report the…
Superconducting thin-films are central to the operation of many kinds of quantum sensors and quantum computing devices: Kinetic Inductance Detectors (KIDs), Travelling-Wave Parametric Amplifiers (TWPAs), Qubits, and Spin-based Quantum…
We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical…
Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, \rho_n ~ 100 $\mu$Ohm cm,…
The non-homogeneity in the critical temperature $T_{c}$ of an Microwave Kinetic Inductance Detector (MKID) could be caused by non-uniformity in the deposition process of the thin superconducting film. This produces low percent yield and…
We have solved numerically the diffusive Usadel equations that describe the spatially-varying superconducting proximity effect in Ti-Al thin-film bi- and trilayers with thickness values that are suitable for Kinetic Inductance Detectors…
We report on the development of Thermal Kinetic Inductance Detectors (TKIDs) suitable to perform X-ray spectroscopy measurements. The aim is to implement MKIDs sensors working in thermal quasi-equilibrium mode to detect X-ray photons as…
Over the last few years there has been a growing interest toward the use of superconducting microwave microresonators operated in quasi-thermal equilibrium mode, especially applied to single particle detection. Indeed, previous devices…
Microwave Kinetic Inductance Detectors (MKIDs) are a class of superconducting cryogenic detectors that simultaneously exhibit energy resolution, time resolution and spatial resolution. The pixel yield of MKID arrays is usually a critical…
We report on the charge carrier dynamics of superconducting titanium nitride (TiN) in the frequency range 90 - 510 GHz (3 - 17 cm-1). The experiments were perfomed on a 18 nm thick TiN film with a critical temperature of 3.4 K. Measurements…
The low frequency complex impedance of a high resistivity 92 {\mu}{\Omega} cm and 100 nm thick TiN superconducting film has been measured via the transmission of several high sensitivity GHz microresonators, down to Tc/50. The temperature…
The European Research Council has recently funded HOLMES, a project with the aim of performing a calorimetric measurement of the electron neutrino mass measuring the energy released in the electron capture decay of 163Ho. The baseline for…
We demonstrate photon-noise limited performance at sub-millimeter wavelengths in feedhorn-coupled, microwave kinetic inductance detectors (MKIDs) made of a TiN/Ti/TiN trilayer superconducting film, tuned to have a transition temperature of…
We report a novel method of growing strongly-disordered superconducting titanium nitride (TiN) thin films by reactive electron-beam deposition. The normal state sheet resistance and superconducting critical temperature (Tc) can be tuned by…
Low temperature Kinetic Inductance Detectors (KIDs) are attractive candidates for producing quantumsensitive, arrayable sensors for astrophysical and other precision measurement applications. The readout uses a low frequency probe signal…
A superconducting Transition-Edge Sensor (TES) with low-$T_c$ is essential in a high resolution calorimetric detection. With a motivation of developing sensitive calorimeters for applications in cryogenic neutrinoless double beta decay…
Thin films of disordered superconductors such as titanium nitride (TiN) exhibit large kinetic inductance (KI), high critical temperature, and large quality factors at the single-photon level. KI nonlinearity can be exploited as an…
The response of superconducting pair-breaking detectors is dependent on the details of the quasiparticle distribution. In Kinetic Inductance Detectors (KIDs), where both pair breaking and non-pair breaking photons are absorbed…
Thin superconducting films form a unique platform for geometrically-confined, strongly-interacting electrons. They allow an inherent competition between disorder and superconductivity, which in turn enables the intriguing…