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Ga2O3 thin films were deposited by reactive magnetron sputtering from a liquid gallium target. The influence of deposition temperature, substrate type, and discharge parameters on the structural and electrical properties was systematically…

Materials Science · Physics 2026-05-01 Petr Novak , Jan Koloros , Stanislav Haviar , Jiri Rezek , Pavel Baroch

Al-doped ZnO thin films were deposited using reactive high power impulse magnetron sputtering at substrate temperatures between room temperature and 600 $\bullet$ C. Two sample series with different oxygen partial pressures were studied.…

Materials Science · Physics 2025-03-03 Martin Mickan , Ulf Helmersson , David Horwat

Here we demonstrate the controlled growth of Bi(110) and Bi(111) films on an (insulating) $\alpha$-Al$_2$O$_3$(0001) substrate by surface X-ray diffraction and X-ray reflectivity using synchrotron radiation. At temperatures as low as 40 K,…

We report the reduction in residual stress of AlN thin films and also the crystal structure, surface morphology and nanomechanical properties of magnetron sputtered as a function of substrate temperature (Ts, 35 - 600 ?C). The residual…

Materials Science · Physics 2017-07-25 Padmalochan Panda , R. Ramaseshan , N Ravi , G. Mangamma , Feby Jose , S. Dash , K. Suzuki , H. Suematsu

We report the growth and properties of epitaxial MgB2 thin films on (0001) Al2O3 substrates. The MgB2 thin films were prepared by depositing boron films via RF magnetron sputtering, followed by a post-deposition anneal at 850C in magnesium…

Plasma enhanced atomic layer deposition was used to deposit thin films of Ga2O3 on to c-plane sapphire substrates using triethylgallium and O2 plasma. The influence of substrate temperature and plasma processing parameters on the resultant…

This paper reports on the deposition of amorphous and crystalline thin films of Ga2O3 by reactive pulsed direct current magnetron sputtering from a liquid gallium target onto fused (f-) quartz and c plane (c-) sapphire substrates, where the…

We report the growth of high-quality c-axis-oriented epitaxial MgB2 thin films by using a pulsed laser deposition technique. The thin films grown on (1`1 0 2) Al2O3 substrates show a Tc of 39 K. The critical current density in zero field is…

Superconductivity · Physics 2009-11-07 W. N. Kang , Hyeong-Jin Kim , Eun-Mi Choi , C. U. Jung , Sung-Ik Lee

We investigate the effect of annealing temperature on the crystalline structure and physical properties of tantalum-pentoxide films grown by radio frequency magnetron sputtering. For this purpose, several tantalum films were deposited and…

We report the growth of high-quality epitaxial MgB2 thin films on (1102) Al2O3 and (001) SrTiO3 substrates by using a pulsed laser deposition technique. The thin films grown on Al2O3 substrates show a Tc of 39 K with a sharp transition…

Superconductivity · Physics 2007-05-23 W. N. Kang , Hyeong-Jin Kim , Eun-Mi Choi , C. U. Jung , Sung-Ik Lee

The application of a substrate bias during rf magnetron sputtering alters the crystalline structure, grain morphology, lattice strain and composition of BaxSr1-xTiO3 thin films. As a result, the dielectric properties of Pt/BaxSr1-xTiO3/Pt…

Materials Science · Physics 2012-10-25 Tommi Riekkinen , Jan Saijets , Pasi Kostamo , Timo Sajavaara , Sebastiaan van Dijken

We report on an XPS study of AlN thin films grown on Si(100) substrates by ion beam sputter deposition (IBSD) in reactive assistance of N+/N2+ ions to unravel the compositional variation of their surface when deposited at different…

Materials Science · Physics 2015-10-05 Neha Sharma , S. Ilango , S. Dash , A. K. Tyagi

Thin films of the recently discovered magnesium diboride (MgB2) intermetalic superconducting compound have been grown using a magnetron sputtering deposition technique followed by in-situ annealing at 830 C. High quality films were obtained…

Superconductivity · Physics 2009-11-07 R. Vaglio , M. G. Maglione , R. Di Capua

We fabricated superconducting MgB2 thin films on (001) MgO substrates. The samples were prepared by magnetron rf and dc co-sputtering on heated substrates. They were annealed ex-situ for one hour at temperatures between 450{\deg}C and…

Superconductivity · Physics 2010-10-27 Savio Fabretti , Patrick Thomas , Markus Meinert , Andy Thomas

NbO2 is a potential material for nanometric memristor devices, both in the amorphous and the crystalline form. We fabricated NbO2 thin films using RF-magnetron sputtering from a stoichiometric target. The as-deposited films were amorphous…

Materials Science · Physics 2019-10-08 Ali Fakih , Johan Biscaras , Abhay Shukla

Nickel oxide (NiO) is a binary compound with a lot of applications in the present technology. NiO thin films were deposited by reactive sputtering magnetron under several voltage biases applied in the glass substrates (0, 50, 100, 200, 300,…

Materials Science · Physics 2016-07-26 Javier García Molleja , Bruna Regalado , Julien Keraudy , Graciela Salum , Pierre-Yves Jouan

Varying the substrate temperature changes structural and magnetic properties of spinel ferrite NZFO thin films. XRD of films grown at different temperature display only 004 reflections, without any secondary peaks, showing growth…

Materials Science · Physics 2018-07-02 Dhiren K. Pradhan , Shalini Kumari , Dillip K. Pradhan , Ashok Kumar , Ram S. Katiyar , R. E. Cohen

We report the synthesis and characterization of Nd_{0.5}Sr_{0.5}MnO_{3} thin films grown by the Pulsed Laser Deposition technique on 100 -oriented LaAlO_{3} substrates. X-ray diffraction (XRD) studies show that the films are 101 -oriented,…

Materials Science · Physics 2009-10-31 W. Prellier , Amlan Biswas , M. Rajeswari , T. Venkatesan , R. L. Greene

We report a Raman scattering investigation of KTa1-xNbxO3 (x = 0.35, 0.5) thin films deposited on MgO and LaAlO3 as a function of temperature. The observed phase sequence in the range from 90 K to 720 K is similar to the structural phase…

Materials Science · Physics 2010-07-16 A. Bartasyte , J. Kreisel , W. Peng , M. Guilloux-Viry

In this work, the results of fabricating ultra thin VO$_2$ films on the technologically relevant amorphous SiO$_2$ surface using reactive DC magnetron sputtering are presented. Results indicate that a post deposition anneal in low partial…

Materials Science · Physics 2016-08-16 Fangfang Song , B. E. White
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