Related papers: Microelectromechanical Resonators for Radio Freque…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
Micro-mechanical resonators are building blocks of a variety of applications in basic science and applied electronics. This device technology is mainly based on well-established and reproducible silicon-based fabrication processes with…
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
This paper discusses a logical operation of multi-memories that consist of coupled nonlinear micro-electro-mechanical systems (MEMS) resonators. A MEMS resonator shows two coexisting stable states when nonlinear responses appear. Previous…
In multi-qubit superconducting systems utilizing flip-chip technology, achieving high accuracy in resonator frequencies is of paramount importance, particularly when multiple resonators share a common Purcell filter with restricted…
We designed an on-chip transformative optic system of a metalens-photonic crystal resonator metasystem on a foundry compatible silicon photonic platform. By adjusting the on-chip metalens' focusing length and mode dimension, the insertion…
A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…
Micro-mechanical resonators are widely used in modern sensing technology due to their high quality-factor (Q), enabling sensitive detection of various stimuli. However, the performance of these resonators in fluid environments is limited by…
This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous…
Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…
Recent advances in nanotechnology have led to the development of nano-electro-mechanical systems (NEMS) such as nanomechanical resonators, which have recently received significant attention from the scientific community. This has not only…
We present a theoretical and experimental study of superconducting ring resonators as an initial step toward their implementation in superconducting electronics and quantum technologies, with promising applications including superconducting…
Gradient acoustic metasurfaces have shown strong potential for manipulation of acoustic waves across the audible and ultrasonic frequency ranges. The key challenge in designing acoustic metasurfaces is to create a series of sub-wavelength…
With much advancement in the field of nanotechnology, bioengineering and synthetic biology over the past decade, microscales and nanoscales devices are becoming a reality. Yet the problem of engineering a reliable communication system…
: It goes without saying that at present MEMS Technology became one of the latest and emerging methods because of its miniaturization and effective cost. Now near the beginning recognition of disease became a major challenge in front of…
Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…
Micro-Electro-Mechanical, so called 'MEMs,' vapor cells are a key component in atom-based quantum sensors, such as clocks, gyroscopes, electric field sensors and magnetometers. MEMs vapor cell fabrication for Rydberg atom radio frequency…
Reconfigurable electromagnetic structures (REMSs), such as reconfigurable reflectarrays (RRAs) or reconfigurable intelligent surfaces (RISs), hold significant potential to improve the spectral efficiency of wireless communication systems…
A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. Simulations and measured results are presented for…
High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the…