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The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device under varying applied RF voltages and driving frequencies are studied using particle-in-cell/Monte Carlo collision simulations. An…
Low-pressure multi-frequency capacitively coupled plasmas are used for numerous etch and deposition applications in the semiconductor industry. Pulsing of the radio-frequency (RF) sources enables control of neutral and charged species in…
Following requirements of the plasma processing industry for increasing throughput, capacitively coupled plasma reactors with large area electrodes driving by very high frequency sources have been proposed. However, such reactors with…
Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive…
We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field applied parallel to the electrodes. Our PIC-MCC simulations show…
SPIDER is the prototype ion source of MITICA, the full-size neutral beam heating system conceived for the ITER tokamak. It includes eight drivers to heat and sustain the inductively coupled plasma (ICP). Owing to their near cylindrical…
In recent decades, different types of plasma sources have been used for various types of plasma processing, such as, etching and thin film deposition. The critical parameter for effective plasma processing is high plasma density. One type…
Electron Cyclotron Resonance Ion Sources are currently the most efficient ion sources among those used in facilities dedicated to nuclear physics. The need for a more flexible magnetic field and RF injection system suggested to design and…
In this article, we present a detailed characterisation of a multicusp-assisted inductively coupled RF plasma source for plasma immersion ion implantation (PIII). Using laser-induced fluorescence (LIF) and RF-compensated Langmuir probe…
The radial characteristics of plasma potential and density around an insulating disc obstacle, placed inside a partially magnetized plasma flow created in cylindrical chamber by hot cathode filament are presented. In the absence of…
Motivated by recent pump-probe experiments indicating enhanced coherent $c$-axis transport in underdoped YBCO, we study Josephson junctions periodically driven by optical pulses. We propose a mechanism for this observation by demonstrating…
The MMWICP (Miniature MicroWave ICP) is a new plasma source using the induction principle. Recently Klute et al. presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the…
We report on the first detailed analysis of large three dimensional (3D) complex plasma structures in experiments performed in pure rf and combined rf+dc discharge modes. Inductively coupled plasma (ICP) is generated by an rf coil wrapped…
A comprehensive theory is proposed to describe the propagation and absorption of ultra-intense, short laser pulse through the under-dense plasma. The kinetic aspects of plasma are fully incorporated using extensive particle-in-cell (PIC)…
We perform extensive 2D Particle-In-Cell (PIC) electromagnetic simulations of low pressure Inductively Coupled Plasma (ICP) discharges with various coil current and driving frequencies. Our simulations show that in low-frequency cases,…
The advancement of millimeter wave and terahertz technologies have revolutionized high speed wireless networks and precise tracking systems. These technologies offer unique penetration capabilities in specific scenarios, significantly…
Laser-induced plasma formation and subsequent relaxation in solid dielectrics is the precursor to structural modifications that are accompanied by a permanent alteration of material properties. The decay of the electron-hole plasma through…
The excitation of plasma wakefields driven by chirped laser pulses is investigated using a reduced relativistic fluid Poisson model supported by fully relativistic particle in cell (PIC) simulations. The study considers exponential, linear,…
We briefly report on some results regarding the impact of very short and intense laser pulses on a cold, low-density plasma initially at rest, and the consequent acceleration of plasma electrons to relativistic energies. Locally and for…
Over the last decades, significant advances in high-power laser systems have enabled rapid progress in the development of laser-driven plasma accelerators. Today, the results obtained in beam stability and reproducibility present laser…