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We introduce a novel optomechanical microgear cavity for both optical and mechanical isotropic materials, featuring a single etch configuration. The design leverages a conjunction of phononic and photonic crystal-like structures to achieve…
We fabricate and characterize a microscale silicon electro-opto-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large…
Tapered silica fibers are often used to rapidly probe the optical properties of micro-resonators. However, their low refractive index precludes phase-matching when coupling to high-index micro-resonators, reducing efficiency. Here we…
Silica microresonators with an inverted-wedge shape were fabricated using conventional semiconductor fabrication methods. The measured quality factors of the resonators were greater than $10^6$ in 1550 nm band. Controllable coupling from…
We demonstrate the fabrication of $\sim$1.08 $\mu$m deep microfluidic cavities with characteristic size as large as 7 mm $\times$ 11 mm or 11 mm diameter, using a silicon$-$glass anodic bonding technique that does not require posts to act…
We describe a micro-fabrication method to create concave features with ultra-low surface roughness in silica, either on the end facets of optical fibers or on flat substrates. The machining uses a single focused CO2 laser pulse. Parameters…
We demonstrate highly efficient coupling of light from an optical fiber to a silicon photonic crystal optomechanical cavity. The fiber-to-cavity coupling utilizes a compact (L ~ 25 um) intermediate adiabatic coupler. The optical coupling is…
We describe the design, fabrication, and characterization of a one-dimensional silicon photonic crystal cavity in which a central slot is used to enhance the overlap between highly localized optical and mechanical modes. The optical mode…
We investigate the suitability of toroidal microcavities for strong-coupling cavity quantum electrodynamics (QED). Numerical modeling of the optical modes demonstrate a significant reduction of modal volume with respect to the whispering…
We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with radius of…
Realizing multiply resonant photonic crystal cavities with large free spectral range is key to achieve integrated devices with highly efficient nonlinear response, such as frequency conversion, four-wave mixing, and parametric oscillation.…
A technique is demonstrated which efficiently transfers light between a tapered standard single-mode optical fiber and a resonant mode of a high-Q photonic crystal cavity with mode volume less than a cubic wavelength in size. Cavity mode…
Glass is increasingly desired as a material for manufacturing complex microscopic geometries, from the micro-optics in compact consumer products to microfluidic systems for chemical synthesis and biological analyses. As the size, geometric,…
We present the design, fabrication, and characterization of a planar silicon photonic crystal cavity in which large position-squared optomechanical coupling is realized. The device consists of a double-slotted photonic crystal structure in…
The heterogeneous integration of silicon with III-V materials provides a way to overcome silicon's limited optical properties toward a broad range of photonic applications. Hybrid modes are a promising way to make heterogeneous Si/III-V…
We experimentally demonstrate high-Q cavity formation at an arbitrary position on a silicon photonic crystal waveguide by bringing a tapered nanofiber into contact with the surface of the slab. An ultrahigh Q of 5.1 x 10^5 is obtained with…
3D printing of high-quality silica photonic structures is particularly challenging, as surface roughness at the nanoscale can severely degrade optical performance through scattering losses. Here, we develop a technique to fold ultrasmooth…
A two-dimensional photonic crystal microcavity design supporting a wavelength-scale volume resonant mode with a calculated quality factor (Q) insensitive to deviations in the cavity geometry at the level of Q~2x10^4 is presented. The…
An electro-optomechanical device capable of microwave-to-optics conversion has recently been demonstrated, with the vision of enabling optical networks of superconducting qubits. Here we present an improved converter design that uses a…
We observe high optical quality factor (Q) polygonal and star coherent optical modes in a lithium niobate microdisk. In contrast to the previous polygon modes achieved by deformed microcavities at lower mechanical and optical Q, we adopted…