Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities
Abstract
We fabricate and characterize a microscale silicon electro-opto-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion.
Keywords
Cite
@article{arxiv.1407.2982,
title = {Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities},
author = {Alessandro Pitanti and Johannes M. Fink and Amir H. Safavi-Naeini and Chan U. Lei and Jeff T. Hill and Alessandro Tredicucci and Oskar Painter},
journal= {arXiv preprint arXiv:1407.2982},
year = {2014}
}
Comments
8 papers, 4 figures