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Single-crystal diamond, with its unique optical, mechanical and thermal properties, has emerged as a promising material with applications in classical and quantum optics. However, the lack of heteroepitaxial growth and scalable fabrication…

Metallic coplanar microwave resonators are widely employed at room temperature, but their low-temperature performance has received little attention so far. We characterize compact copper coplanar resonators with multiple modes from 2.5 to…

This work unlocks the manufacturing of nanophotonic quantum systems that exploit the unique material properties of single-crystal diamond (SCD). We achieve this by introducing a semiconductor-compatible process for the direct bonding of…

Quantum Physics · Physics 2026-03-19 Dominic Lepage , Amin Yaghoobi , Heidi Tremblay , Dominique Drouin

The applications of nanomechanical resonators range from biomolecule mass sensing to hybrid quantum interfaces. Their performance is often limited by internal material damping, which can be greatly reduced by using crystalline materials.…

Mesoscale and Nanoscale Physics · Physics 2025-04-24 Leo Sementilli , Daniil M. Lukin , Hope Lee , Joshua Yang , Erick Romero , Jelena Vučković , Warwick P. Bowen

We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10 million at high microwave powers and over 1 million at low powers, with the best low power results approaching 2…

High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…

Mesoscale and Nanoscale Physics · Physics 2016-03-07 A. H. Ghadimi , D. J. Wilson , T. J. Kippenberg

Diamond integrated photonic devices are promising candidates for emerging applications in nanophotonics and quantum optics. Here we demonstrate active modulation of diamond nanophotonic circuits by exploiting mechanical degrees of freedom…

Applications in quantum information processing and photon detectors are stimulating a race to produce the highest possible quality factor on-chip superconducting microwave resonators. We have tested the surface-dominated loss hypothesis by…

Superconductivity · Physics 2012-06-06 K. Geerlings , S. Shankar , E. Edwards , L. Frunzio , R. J. Schoelkopf , M. H. Devoret

The development of solid-state photonic quantum technologies is of great interest for fundamental studies of light-matter interactions and quantum information science. Diamond has turned out to be an attractive material for integrated…

Numerous bulk crystalline materials exhibit attractive nonlinear and luminescent properties for classical and quantum optical applications. A chip-scale platform for high quality factor optical nanocavities in these materials will enable…

Diamond has superlative material properties for a broad range of quantum and electronic technologies. However, heteroepitaxial growth of single crystal diamond remains limited, impeding integration and evolution of diamond-based…

A key challenge for quantum photonic technologies based on spin qubits is the creation of optically active defects in photonic resonators. Several of the most promising defects for quantum applications are hosted in diamond, and are…

The ultra-wide bandgap of diamond distinguishes it from other semiconductors, in that all known defects have deep energy levels that are inactive at room temperature. Here, we present the effect of deep defects on the mechanical energy…

In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…

Other Computer Science · Computer Science 2008-02-27 H. Mathias , F. Parrain , J. -P. Gilles , S. Megherbi , M. Zhang , Ph. Coste , A. Dupret

Here, we demonstrate the fabrication of single-layer MoS2 mechanical resonators. The fabricated resonators have fundamental resonance frequencies in the order of 10 MHz to 30 MHz (depending on their geometry) and their quality factor is…

Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic…

We studied the frequency and quality factor of mechanical plasmonic nanoresonators as a function of temperature, ranging from ambient to 4 K. Our investigation focused on individual gold nanorods and nanodisks of various sizes. We observed…

The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric losses at different surfaces and interfaces. {\alpha}-tantalum is a superconductor that has proven effective in reducing…

Single crystal, nanoscale diamond membranes are highly sought after for a variety of applications including nanophotonics, nanoelectronics and quantum information science. However, so far, the availability of conductive diamond membranes…

We study a setup where a single negatively-charged silicon-vacancy center in diamond is magnetically coupled to a low-frequency mechanical bending mode and via strain to the high-frequency phonon continuum of a semi-clamped diamond beam. We…

Mesoscale and Nanoscale Physics · Physics 2017-01-12 K. V. Kepesidis , M. -A. Lemonde , A. Norambuena , J. R. Maze , P. Rabl