Related papers: Comparison of capacitive and frequential readout w…
This article presents a comprehensive study and design methodology of co-integrated oscillators for nano mass sensing application based on resonant Nano-Electro-Mechanical-System (NEMS). In particular, it reports the capacitive with the…
This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass…
Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…
This paper presents realistic system-level modelling and simulation of effective noise sources in a coupled resonating MEMS sensors. A governing set of differential equations are used to build a numerical model of a mechanical noise source…
This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the…
We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for…
This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…
Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…
Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…
Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of…
Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…
Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…
This research provides the theoretical feasibility study of a novel architecture of a MEMS differential resonant accelerometer, with switchable and tunable electrostatic transmission between the proof mass and the vibrating sensing beams.…
Mechanical resonances are used in a wide variety of devices; from smart phone accelerometers to computer clocks and from wireless communication filters to atomic force microscope sensors. Frequency stability, a critical performance metric,…
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to…
Compressed sensing (CS) is a sampling paradigm that allows to simultaneously measure and compress signals that are sparse or compressible in some domain. The choice of a sensing matrix that carries out the measurement has a defining impact…
We show that non-exponential fidelity decays in randomized benchmarking experiments on quantum dot qubits are consistent with numerical simulations that incorporate low-frequency noise. By expanding standard randomized benchmarking analysis…
Nano electromechanical systems are considered as ultra sensitive devices for mass and force detection. Capacitive actuation is widely used in these devices but is known to degrade the quality factor of the resonator due to DC electrostatic…
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good…
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…