Related papers: Integrated high frequency aluminum nitride optomec…
Aluminum remains the central material for superconducting qubits, and considerable effort has been devoted to optimizing its deposition and patterning for quantum devices. However, while post-processing of Nb- and Ta-based resonators has…
Superconducting thin films with high intrinsic kinetic inductance are of great importance for photon detectors, achieving strong coupling in hybrid systems, and protected qubits. We report on the performance of titanium nitride resonators,…
Suspended optical microresonators are promising devices for on-chip photonic applications such as radio-frequency oscillators, optical frequency combs, and sensors. Scaling up these devices demand the capability to tune the optical…
We demonstrate the coupling of rare-earth ions locally implanted in a substrate (Gd$^{3+}$ in Al$_{2}$O$_{3}$) to a superconducting NbN lumped-element micro-resonator. The hybrid device is fabricated by a controlled ion implantation of…
Silicon nitride membranes are a powerful and ubiquitous optomechanical resonator technology, enabling high mechanical Q, low optical loss, and enhanced optomechanical coupling via a panoply of strain-, phononic-, and photonic-crystal…
Studies involving nanomechanical motion have evolved from its detection and understanding of its fundamental aspects to its promising practical utility as an integral component of hybrid systems. Nanomechanical resonators' indispensable…
Superconducting resonators with high-kinetic inductance play a central role in hybrid quantum circuits, enabling strong coupling with quantum systems with small electric dipole moment and improved parametric amplification. However,…
The development of large-scale quantum processors benefits from superconducting qubits that can operate at elevated temperatures and be fabricated with scalable, foundry-compatible processes. Atomic layer deposition (ALD) is increasingly…
Transition metal nitrides have recently gained attention in the fields of plasmonics, plasmon-enhanced photocatalysis, photothermal applications, and nonlinear optics because of their suitable optical properties, refractory nature, and…
High voltage (~2 kV) AlGaN-channel HEMTs were fabricated with 64% Aluminum composition in the channel. The average on-resistance was ~75 ohm. mm (~21 miliohm. cm^2) for LGD = 20 microns. Breakdown voltage reached >3 kV (tool limit) before…
High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…
Aluminum scandium nitride (AlScN) is a promising barrier material for gallium nitride (GaN)-based transistors for the next generation of radio-frequency electronic devices. In this work, we examine the transport properties of two…
We propose a thin, compact, broadband, polarization and angle insensitive metamaterial absorber based on a tungsten reflector, silicon spacer and a top pattern composed of a double square-like ring resonator utilizing nickel(Ni). In such a…
Nanomechanical photonic metamaterials provide a wealth of active switching, nonlinear and enhanced light-matter interaction functionalities by coupling optically and mechanically resonant subsystems. Thermal (Brownian) motion of the…
Femtosecond Laser Micromachining (FLM) is a powerful technology for the fabrication of photonic devices. In this context, the integration of resonant elements within the platform represents a key advancement, enhancing both its versatility…
N-polar aluminum nitride (AlN) is an important building block for next-generation high-power RF electronics. We report successful homoepitaxial growth of N-polar AlN by molecular beam epitaxy (MBE) on large-area cost-effective N-polar AlN…
Superconducting resonators are widely used in many applications such as qubit readout for quantum computing, and kinetic inductance detectors. These resonators are susceptible to numerous loss and noise mechanisms, especially the…
We present ab initio density-functional calculations for acceptors, donors, and native defects in aluminum nitride, showing that acceptors are deeper (Be ~ 0.25 eV, Mg_ 0.45 eV) and less soluble than in GaN; at further variance with GaN,…
Cavity opto-mechanics enabled radiation pressure (RP) driven oscillators shown in the past offer an all optical Radio Frequency (RF) source without the need for external electrical feedback. However these oscillators require external…
Optical guided wave dielectric structures with nanoscale slots are known to provide strong electric field enhancements in the slotted region, enabling strong light-matter interactions. Here we demonstrate an ultrahigh-Q slotted 2D photonic…