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Planar superconducting microwave resonators are key elements in a variety of technical applications and also act as sensitive probes for microwave spectroscopy of various materials of interest. Here superconducting Pb is a suitable material…

Superconductivity · Physics 2016-10-11 Nikolaj G Ebensperger , Markus Thiemann , Martin Dressel , Marc Scheffler

The loss in superconducting microwave resonators at low-photon number and low temperatures is not well understood but has implications for achievable coherence times in superconducting qubits. We have fabricated single-layer resonators with…

Superconductivity · Physics 2015-05-19 Moe S. Khalil , F. C. Wellstood , Kevin D. Osborn

Superconducting coplanar waveguide (SCPW) resonators have a wide range of applications due to the combination of their planar geometry and high quality factors relative to normal metals. However, their performance is sensitive to both the…

Superconductivity · Physics 2015-05-20 Jeremy M. Sage , Vladimir Bolkhovsky , William D. Oliver , Benjamin Turek , Paul B. Welander

We describe a fully broadband approach for electron spin resonance (ESR) experiments where it is possible to not only tune the magnetic field but also the frequency continuously over wide ranges. Here a metallic coplanar transmission line…

Suspending devices on thin SiN membranes can limit their interaction with the bulk substrate and reduce parasitic capacitance to ground. While suspending devices on membranes is used in many fields including radiation detection using…

We present superconducting microwave-frequency resonators based on NbTiN nanowires. The small cross section of the nanowires minimizes vortex generation, making the resonators resilient to magnetic fields. Measured intrinsic quality factors…

Mesoscale and Nanoscale Physics · Physics 2016-04-13 N. Samkharadze , A. Bruno , P. Scarlino , G. Zheng , D. P. DiVincenzo , L. DiCarlo , L. M. K. Vandersypen

We describe measurements on microwave coplanar resonators designed for quantum bit experiments. Resonators have been patterned onto sapphire and silicon substrates, and quality factors in excess of a million have been observed. The resonant…

Superconductivity · Physics 2009-11-13 J. E. Healey , T. Lindstrom , M. S. Colclough , C. M. Muirhead , A. Ya Tzalenchuk

We report on propagating spin-wave spectroscopy measurements carried out on coplanar nano-antenna devices made from a Si/SiO$_2$/Ru(5nm)/Co(20)/Pt(5nm) film. The measurements were analyzed in detail by employing newly developed theoretical…

Thin-film superconducting transmission lines play important roles in many signal transmission and detection systems, including qubit coupling and read-out schemes, electron spin resonance systems, parametric amplifiers, and various ultra…

Superconductivity · Physics 2018-08-07 Songyuan Zhao , Stafford Withington , David J. Goldie , Chris N. Thomas

We report the development of a continuous-wave and pulsed X-band electron spin resonance (ESR) spectrometer for the study of spins on ordered surfaces down to cryogenic temperatures. The spectrometer operates in ultra-high vacuum and…

Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…

Quantum Physics · Physics 2016-01-18 Paul B. Dieterle , Mahmoud Kalaee , Johannes Fink , Oskar Painter

We design and fabricate two types of superconducting niobium coplanar waveguide microwave resonators with different coupling capacitors on high purity Si substrates. Their microwave transmissions are measured at the temperatures of 20 mK.…

Characterizing superconducting microwave resonators with highly dissipative elements is a technical challenge, but a requirement for implementing and understanding the operation of hybrid quantum devices involving dissipative elements, e.g.…

Coplanar microwave resonators made of 330 nm-thick superconducting YBCO have been realized and characterized in a wide temperature ($T$, 2-100 K) and magnetic field ($B$, 0-7 T) range. The quality factor $Q_L$ exceeds 10$^4$ below 55 K and…

The electronic properties of superconducting Sn films ($T_c \approx$ 3.8 K) change significantly when reducing the film thickness down to a few nm, in particular close to the percolation threshold. The low-energy electrodynamics of such Sn…

We report on the design, fabrication and characterization of superconducting coplanar waveguide resonators with nanoscopic constrictions. By reducing the size of the center line down to 50 nm, the radio frequency currents are concentrated…

We have measured noise in thin-film superconducting coplanar waveguide resonators. This noise appears entirely as phase noise, equivalent to a jitter of the resonance frequency. In contrast, amplitude fluctuations are not observed at the…

Superconductivity · Physics 2015-06-25 Jiansong Gao , Benjamin A. Mazin , Peter K. Day , Jonas Zmuidzinas , Henry G. LeDuc

We have grown superconducting TiN films by atomic layer deposition with thicknesses ranging from 6 to 89 nm. This deposition method allows us to tune the resistivity and critical temperature by controlling the film thickness. The microwave…

Millimeter-wave superconducting resonators are a useful tool for studying quantum device coherence in a new frequency domain. However, improving resonators is difficult without a robust and reliable method for coupling millimeter-wave…

We present non-conventional electron spin resonance (ESR) experiments using microfabricated superconducting waveguides. We show that a very broad frequency range, from 0.5 to 40 GHz, becomes accessible with a high frequency accuracy of less…

Mesoscale and Nanoscale Physics · Physics 2014-01-13 C. Clauss , D. Bothner , D. Koelle , R. Kleiner , L. Bogani , M. Scheffler , M. Dressel