Related papers: Dynamics of Electrostatic MEMS Actuators
This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted…
A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to analyze electrostatic MEMS actuators using their energy-charge…
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor…
This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently…
The recent discovery of electro-active polymers has shown great promises in the field of soft robotics, and was logically followed by experimental, numerical and theoretical developments. Most of these studies were concerned with systems…
This paper presents the design of a nonlinear control law for a typical electromagnetic actuator system. Electromagnetic actuators are widely implemented in industrial applications, and especially as linear positioning system. In this work,…
Series Elastic Actuators provide many benefits in force control of robots in unconstrained environments. These benefits include high force fidelity, extremely low impedance, low friction, and good force control bandwidth. Series Elastic…
We propose a framework to model ferroelectric negative capacitance: electrostatic Micro Electro Mechanical Systems (MEMS) hybrid actuators and analyze their dynamic (step input) response. Using this framework, we report the first proposal…
In this work we study the mass-spring system \begin{equation} \ddot x + \alpha \dot x + x = - \frac{\lambda} {(1+x)^{2}}, \label{e:inertia} \end{equation} which is a simplified model for an electrostatically actuated MEMS device. The static…
Electromagnetic relays and solenoid actuators are commonly used for their bistable behavior, which allows for switching between two states in electrical, pneumatic, or hydraulic circuits, among other applications. Although there has been…
We propose an energy-based framework to analyze the statics and dynamics of a ferroelectric negative capacitance-hybrid Microelectromechanical System (MEMS) actuator. A mapping function that relates the charge on the ferroelectric to…
This paper deals with the robust force and position control problems of Series Elastic Actuators. It is shown that a Series Elastic Actuator's force control problem can be described by a second-order dynamic model which suffers from only…
We study the dynamics of MEMS microbeams undergoing electrostatic pull-in. At DC voltages close to the pull-in voltage, experiments and numerical simulations have reported `bottleneck' behaviour in which the transient dynamics slow down…
Electrostatic and Casimir interactions limit the range of positional stability of electrostatically-actuated or capacitively-coupled mechanical devices. We investigate this range experimentally for a generic system consisting of a…
Dielectric elastomer actuators have become one of the most important smart material transducers in recent times. One of the crucial aspects in this field is the application of bias to find the best operating conditions. The basic task is to…
In the field of soft dielectric elastomers, the notion electrostriction indicates the dependency of the permittivity on strain. The present paper is aimed at investigating the effects of electrostriction onto the stability behaviour of…
We explore the undamped response of step-voltage driven parallel plates and fixed-fixed microbeams. We consider a third order correction in the parallel plate system as a reduced order system to model mid-plane stretching in fixed-fixed…
Electromechanical models are crucial in the design and control of motors and actuators. Modeling, identification, drive, and current control loop of a limited-rotation actuator with magnetic restoration is presented. New nonlinear and…
We consider the dynamics of overdamped MEMS devices undergoing the pull-in instability. Numerous previous experiments and numerical simulations have shown a significant increase in the pull-in time under DC voltages close to the pull-in…
A layer of dielectric elastomer can be voltage actuated to behave as actuators, but needs to avoid the electromechanical instability of excessively thin down accompanied with electric breakdown. We develop a true method to analyze the…