English
Related papers

Related papers: Dynamics of Electrostatic MEMS Actuators

200 papers

A dielectric elastomer whose edges are held fixed will buckle, given sufficient applied voltage, resulting in a nontrivial out-of-plane deformation. We study this situation numerically using a nonlinear elastic model which decouples two of…

Applied Physics · Physics 2018-02-12 Jacob Langham , Hadrien Bense , Dwight Barkley

The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…

Applied Physics · Physics 2020-02-07 Ulrike Nabholz , Michael Curcic , Jan E. Mehner , Peter Degenfeld-Schonburg

The oscillatory response of nonlinear systems exhibits characteristic phenomena such as multistability, discontinuous jumps and hysteresis. These can be utilized in applications leading, e.g., to precise frequency measurement, mixing,…

Mesoscale and Nanoscale Physics · Physics 2015-05-14 Quirin P. Unterreithmeier , Thomas Faust , Jorg P. Kotthaus

A variational approach is employed to find stationary solutions to a free boundary problem modeling an idealized electrostatically actuated MEMS device made of an elastic plate coated with a thin dielectric film and suspended above a rigid…

Analysis of PDEs · Mathematics 2014-09-10 Philippe Laurencot , Christoph Walker

We propose a protocol to model accurately the electromechanical behavior of dielectric elastomer membranes using experimental data of stress-stretch and voltage-stretch tests. We show how the relationship between electric displacement and…

Soft Condensed Matter · Physics 2018-11-14 Giuseppe Zurlo , Michel Destrade , Tongqing Lu

Nonlinear elastic effects play an important role in the dynamics of microelectromechanical systems (MEMS). Duffing oscillator is widely used as an archetypical model of mechanical resonators with nonlinear elastic behavior. In contrast,…

Other Condensed Matter · Physics 2009-11-12 S. Zaitsev , O. Shtempluck , E. Buks , O. Gottlieb

It is well known that a charged particle cannot be in stable equilibrium in a purely electrostatic field. The situation is different in a magnetostatic field; consequently, magnetic levitation is possible while electrostatic levitation is…

General Physics · Physics 2012-10-02 E. N. Miranda

In this paper, we present a new piezoelectric actuator and piezoelectric composite model and show the well-posedness of these systems. Furthermore, we show that the piezoelectric composite is stabilizable for certain system parameters. In…

Dynamical Systems · Mathematics 2024-10-28 Matthijs C. de Jong , Jacquelien M. A. Scherpen

Using numerical simulations, we characterized the behavior of an elastic membrane immersed in an active fluid. Our findings reveal a nontrivial folding and re-expansion of the membrane that is controlled by the interplay of its resistance…

Soft Condensed Matter · Physics 2015-07-24 S. A. Mallory , C. Valeriani , A. Cacciuto

We study the response of a large array of coupled nonlinear oscillators to parametric excitation, motivated by the growing interest in the nonlinear dynamics of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). Using…

Other Condensed Matter · Physics 2009-04-09 Yaron Bromberg , M. C. Cross , Ron Lifshitz

The response of a large array of coupled nonlinear oscillators to parametric excitation is studied, motivated by the growing interest in the nonlinear dynamics of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS).…

Other Condensed Matter · Physics 2007-05-23 Yaron Bromberg

In this article, a systematic and comprehensive approach based on finite element analysis and analytical modelling for studying static pull-in phenomena in hybrid levitation micro-actuators is presented. A finite element model of…

Systems and Control · Electrical Eng. & Systems 2020-06-02 Kirill Poletkin

In this letter, we provide a detailed numerical examination of the dynamics of a charged Thomas oscillator in an external magnetic field. We do so by adopting and then modifying the cyclically symmetric Thomas oscillator to study the…

Chaotic Dynamics · Physics 2022-11-02 Vinesh Vijayan , Pranaya Pratik Das

Assuming the charged particle to be a two-dimensional oscillator that scatters the classical background of zero-point field one can deduce the Coulomb force of the two interacting particles. The correct deduction of the force is conditioned…

General Physics · Physics 2021-06-09 Ion Simaciu , Zoltan Borsos , Viorel Drafta , Gheorghe Dumitrescu

Robotic systems driven by conventional motors often suffer from challenges such as large mass, complex control algorithms, and the need for additional braking mechanisms, which limit their applications in lightweight and compact robotic…

Robotics · Computer Science 2025-11-12 Huacen Wang , Hongqiang Wang

This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions…

Applied Physics · Physics 2017-09-27 Binh Duc Truong , Cuong Phu Le , Einar Halvorsen

The evolution problem for a membrane based model of an electrostatically actuated microelectromechanical system (MEMS) is studied. The model describes the dynamics of the membrane displacement and the electric potential. The latter is a…

Analysis of PDEs · Mathematics 2012-11-27 Joachim Escher , Philippe Laurencot , Christoph Walker

Micro-Electro Mechanical Systems (MEMS) are defined as very small structures that combine electrical and mechanical components on a common substrate. Here, the electrostatic-elastic case is considered, where an elastic membrane is allowed…

Dynamical Systems · Mathematics 2026-04-10 Annalisa Iuorio , Nikola Popovic , Peter Szmolyan

In equilibrium, the physical properties of matter are set by the interactions between the constituents. In contrast, the energy input of the individual components controls the behavior of synthetic or living active matter. Great progress…

Soft Condensed Matter · Physics 2025-08-29 Q. Martinet , Y. Li , A. Aubret , E. Hannezo , J. Palacci

Electrostatic waves in a collision-free unmagnetized plasma of electrons with fixed ions are investigated for electron equilibrium velocity distribution functions that deviate slightly from Maxwellian. Of interest are undamped waves that…

Plasma Physics · Physics 2015-06-05 F. Valentini , D. Perrone , F. Califano , F. Pegoraro , P. Veltri , P. J. Morrison , T. M. O'Neil