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We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane,…

We report on the fabrication and characterization of a micromechanical oscillator consisting only of a free-standing dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid…

Materials Science · Physics 2009-11-11 H. R. Boehm , S. Gigan , G. Langer , J. Hertzberg , F. Blaser , D. Baeuerle , K. Schwab , A. Zeilinger , M. Aspelmeyer

We have realized a suspended, high-reflectivity focusing metamirror ($f\approx 10$ cm, $\mathcal{R} \approx 99\%$) by non-periodic photonic crystal patterning of a Si$_3$N$_4$ membrane. The design enables construction of a stable, short…

Optics · Physics 2024-02-22 A. R. Agrawal , J. Manley , D. Allepuz-Requena , D. J. Wilson

We demonstrate a "membrane in the middle" optomechanical system using a silicon nitride membrane patterned as a subwavelength grating. The grating has a reflectivity of over 99.8%, effectively creating two sub-cavities, with free spectral…

Optics · Physics 2015-06-22 Corey Stambaugh , Haitan Xu , Utku Kemiktarak , Jacob Taylor , John Lawall

We report on the first demonstration of a fully suspended 10m Fabry-Perot cavity incorporating a waveguide grating as the coupling mirror. The cavity was kept on resonance by reading out the length fluctuations via the Pound-Drever-Hall…

We demonstrate passive feedback cooling of a mechanical resonator based on radiation pressure forces and assisted by photothermal forces in a high-finesse optical cavity. The resonator is a free-standing high-reflectance micro-mirror (of…

A new dielectric Fabry-Perot cavity was designed for a resonant enhancing optical absorption by a thin absorber layer embedded into the cavity. In this cavity, the front mirror is a subwavelength grating with $\sim 100$% retroreflection.…

Optics · Physics 2013-07-09 Moshe Zohar , Mark Auslender , Lorenzo Faraone , Shlomo Hava

We propose and design a stoichiometric silicon-nitride membrane resonator featuring highly reflective at multi-wavelengths and high mechanical quality factor. The membrane resonator has a thickness of 100 nm and 2D-photonic and phononic…

Optics · Physics 2024-12-30 Hanbing Li , Doudou Wang , Quansen Zhang , Qiang Zhang , Yongmin Li

Photonic crystal (PhC) membranes patterned with sub-wavelength periods offer a unique combination of high reflectivity, low mass, and high mechanical quality factor. We demonstrate a PhC membrane that we use as one mirror of a Fabry-Perot…

Optics · Physics 2022-11-22 Feng Zhou , Yiliang Bao , Jason J. Gorman , John Lawall

We have designed photonic crystal suspended membranes with optimized optical and mechanical properties for cavity optomechanics. Such resonators sustain vibration modes in the megahertz range with quality factors of a few thousand. Thanks…

Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle…

We report on the optical characterization of an ultra-high diffraction efficiency grating in 1st order Littrow configuration. The apparatus used was an optical cavity built from the grating under investigation and an additional high…

We experimentally and theoretically investigate mechanical nanooscillators coupled to the light in an optical ring resonator made of dielectric mirrors. We identify an optomechanical damping mechanism that is fundamentally different to the…

In this study, we theoretically and numerically investigate the resonant modes and reflectance of an optical grating consisting of a wavy dielectric slab by applying the spectral element method. The presence of the wavy shape transforms the…

Optics · Physics 2022-11-14 Ma Luo , Feng Wu

We report a process for fabricating high quality, defect-free spherical mirror templates suitable for developing high finesse optical Fabry-Perot resonators. The process utilizes the controlled reflow of borosilicate glass and differential…

Quantum Physics · Physics 2015-05-30 Arpan Roy , Murray D. Barrett

On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…

Mesoscale and Nanoscale Physics · Physics 2020-07-21 A. N. Pearson , K. E. Khosla , M. Mergenthaler , G. A. D. Briggs , E. A. Laird , N. Ares

A metamaterial structure consisting of a one-dimensional metal/air-gap subwavelength grating is investigated for optical antireflection coating on germanium substrate in the infrared regime. For incident light polarized perpendicularly to…

Optics · Physics 2023-07-19 Wonkyu Kim , Junpeng Guo , Joshua Hendrickson

We present a new micromechanical resonator designed for cavity optomechanics. We have used a micropillar geometry to obtain a high-frequency mechanical resonance with a low effective mass and a very high quality factor. We have coated a…

Multi-element cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical…

Mesoscopic self-collimation in mesoscopic photonic crystals with high reflectivity is exploited to realize a novel high-Q factor cavity by means of mesoscopic PhC planar mirrors. These mirrors efficiently confine a mode inside a planar…

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