A high-reflectivity high-Q micromechanical Bragg-mirror
Materials Science
2009-11-11 v2
Abstract
We report on the fabrication and characterization of a micromechanical oscillator consisting only of a free-standing dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400ng, and a mechanical quality factor Q of approximately 10^4. Using this micromirror in a Fabry Perot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high-Q high-finesse cavities on chip.
Cite
@article{arxiv.cond-mat/0607771,
title = {A high-reflectivity high-Q micromechanical Bragg-mirror},
author = {H. R. Boehm and S. Gigan and G. Langer and J. Hertzberg and F. Blaser and D. Baeuerle and K. Schwab and A. Zeilinger and M. Aspelmeyer},
journal= {arXiv preprint arXiv:cond-mat/0607771},
year = {2009}
}
Comments
3 pages, 2 figures