Related papers: Application of elastic mid-IR-laser-light scatteri…
A method of the mid-IR-laser microscopy has been proposed for the investigation of the large-scale electrically and recombination active defects in semiconductors and non-destructive inspection of semiconductor materials and structures in…
A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in CZ Si crystals. A classifcation of scattering inhomogeneities in initial…
Recently, the internal gettering process has become one of the main operations for manufacturing of semiconductor devices of CZ Si. However, methods for the direct inspection of the internal gettering efficiency and stability have been…
A non-destructive optical technique described in this paper is an effective new tool for the investigation of defects in semiconductors. The basic instrument for this technique---a mid-IR-laser microscope---being sensitive to accumulations…
A method of scanning mid-IR-laser microscopy has recently been proposed for the investigation of large-scale electrically and recombination-active defects in semiconductors and non-destructive inspection of semiconductor materials and…
This paper presents a new technique of optical beam-induced scattering of mid-IR-laser radiation, which is a special mode of the recently developed scanning mid-IR-laser microscopy. The technique in its present form is designed for…
The scanning mid-IR-laser microscopy was previously demonstrated as an effective tool for characterization of different semiconductor crystals. Now the technique has been successfully applied for the investigation of CZ SixGe1-x -- a…
Non-invasive light scattering methods provide data on biological macromolecules (i.e. proteins, nucleic acids, as well as assemblies and larger entities composed of them) that are complementary with those of size exclusion chromatography,…
The scanning mid-IR-laser microscopy was previously demonstrated as an effective tool for characterization of different semiconductor crystals. Now the technique has been successfully applied for the investigation of CZ Si$_x$Ge$_{1-x}$---a…
Elastic light scattering by low-dimensional semiconductor objects is investigated theoretically. The differential cross section of resonant light scattering on excitons in quantum dots is calculated. The polarization and angular…
This paper introduces the Infra-Red, In Situ (IRIS) inspection method, which uses short-wave IR (SWIR) light to non-destructively "see through" the backside of chips and image them with lightly modified conventional digital CMOS cameras.…
We describe a self calibrating optical technique that allows to perform absolute measurements of scattering cross sections for the light scattered at extremely small angles. Very good performances are obtained by using a very simple optical…
This paper aims to evaluate mid-infrared (MIR) Optical Coherence Tomography (OCT) systems as a tool to penetrate different materials and detect sub-surface irregularities. This is useful for monitoring production processes, allowing…
Owing to its capacity for unique (bio)-chemical specificity, microscopy withmid-IR illumination holds tremendous promise for a wide range of biomedical and industrial applications. The primary limitation, however, remains detection; with…
We summarize the R&D activities on a novel semitransparent microstrip sensor to be used on laser-based alignment systems for silicon trackers. The new sensor is used both for particle tracking and laser detection. The aim of this research…
An uncommon double-ray scenario of light resonant scattering by a periodic metasurface is proposed to provide strong non-specular reflection. The metasurface is constracted as an array of silicon nanodisks placed on thin silica-on-metal…
Microplastic pollution studies depend on reliable identification of the suspicious particles. Out of the various analytical techniques available to characterize them, infrared transflectance using a tuneable mid-IR quantum cascade laser is…
The optical elements comprised of sub-diffractive light scatterers, or metasurfaces, hold a promise to reduce the footprint and unfold new functionalities of optical devices. A particular interest is focused on metasurfaces for manipulation…
We investigate a method for controlling light scattering based on the excitation of non-radiating states in a half-space through a tailored choice of incident radiation. For a fixed particle geometry, we demonstrate that small variations in…
Low energy ion scattering is a technique to detect the energy of ions which are scattered from a surface. For noble gas ions, it is predominantly sensitive to the topmost surface layer due to strong neutralisation processes. Depending on…