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We have developed a real-space method to correct distortion due to thermal drift and piezoelectric actuator nonlinearities on scanning tunneling microscope images using Matlab. The method uses the known structures typically present in…

Instrumentation and Detectors · Physics 2017-02-03 Mitchell P. Yothers , Aaron E. Browder , Lloyd A. Bumm

4D-STEM, in which the 2D diffraction plane is captured for each 2D scan position in the scanning transmission electron microscope (STEM) using a pixelated detector, is complementing and increasingly replacing existing imaging approaches.…

Instrumentation and Detectors · Physics 2022-07-27 Colum M. O'Leary , Benedikt Haas , Christoph T. Koch , Peter D. Nellist , Lewys Jones

Scanning Transmission Electron Microscopy (STEM) has become the main stay for materials characterization on atomic level, with applications ranging from visualization of localized and extended defects to mapping order parameter fields. In…

Instrumentation and Detectors · Physics 2019-01-15 Xin Li , Ondrej Dyck , Sergei V. Kalinin , Stephen Jesse

Scanning Transmission Electron Microscopy (STEM) enables the observation of atomic arrangements at sub-angstrom resolution, allowing for atomically resolved analysis of the physical and chemical properties of materials. However, due to the…

Computer Vision and Pattern Recognition · Computer Science 2025-04-04 Hesong Li , Ziqi Wu , Ruiwen Shao , Tao Zhang , Ying Fu

We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly…

Instrumentation and Detectors · Physics 2026-03-19 Akira Yasuhara , Takumi Sannomiya , Ryoichi Horisaki

Scanning electron microscopy (SEM) is a versatile technique used to image samples at the nanoscale. Conventional imaging by this technique relies on finding the average intensity of the signal generated on a detector by secondary electrons…

Instrumentation and Detectors · Physics 2021-11-04 Akshay Agarwal , John Simonaitis , Vivek K. Goyal , Karl K. Berggren

Aberration corrected scanning transmission electron microscopes (STEM) enable to determine local strain fields, composition and bonding states at atomic resolution. The precision to locate atomic columns is often obstructed by scan…

Applied Physics · Physics 2019-01-16 Benjamin Berkels , Christian H. Liebscher

Scanning electron microscopy (SEM) is indispensable in diverse applications ranging from microelectronics to food processing because it provides large depth-of-field images with a resolution beyond the optical diffraction limit. However,…

Scanning transmission electron microscopy (STEM) has advanced rapidly in the last decade thanks to the ability to correct the major aberrations of the probe forming lens. Now atomic-sized beams are routine, even at accelerating voltages as…

In the Reverse Engineering and Hardware Assurance domain, a majority of the data acquisition is done through electron microscopy techniques such as Scanning Electron Microscopy (SEM). However, unlike its counterparts in optical imaging,…

Image and Video Processing · Electrical Eng. & Systems 2020-04-30 Ronald Wilson , Navid Asadizanjani , Domenic Forte , Damon L. Woodard

Aberration-corrected scanning transmission electron microscopes (STEM) provide sub-angstrom lateral resolution; however, the large convergence angle greatly reduces the depth of field. For microscopes with a small depth of field,…

Materials Science · Physics 2011-12-15 Robert Hovden , Huolin L. Xin , David A. Muller

In scanning electron microscopy, the achievable image quality is often limited by a maximum feasible acquisition time per dataset. Particularly with regard to three-dimensional or large field-of-view imaging, a compromise must be found…

Computer Vision and Pattern Recognition · Computer Science 2018-01-15 Patrick Trampert , Faysal Bourghorbel , Pavel Potocek , Maurice Peemen , Christian Schlinkmann , Tim Dahmen , Philipp Slusallek

A new tool providing material contrast control in scanning electron microscopy (SEM) is demonstrated. The approach is based on deep-UV illumination during SEM imaging and delivers a novel material based contrast as well as higher resolution…

Instrumentation and Detectors · Physics 2016-04-07 Gediminas Seniutinas , Armandas Balcytis , Saulius Juodkazis

Scanning Electron Microscopy (SEM) is critical in nanotechnology, materials science, and biological imaging due to its high spatial resolution and depth of focus. Signal-to-noise ratio (SNR) is an essential parameter in SEM because it…

Machine Learning · Computer Science 2025-10-10 K. S. Sim , I. Bukhori , D. C. Y. Ong , K. B. Gan

Scene inference under low-light is a challenging problem due to severe noise in the captured images. One way to reduce noise is to use longer exposure during the capture. However, in the presence of motion (scene or camera motion), longer…

Computer Vision and Pattern Recognition · Computer Science 2022-07-26 Bhavya Goyal , Jean-François Lalonde , Yin Li , Mohit Gupta

Traditional image acquisition for cryo focused ion-beam scanning electron microscopy tomography often sees thousands of images being captured over a period of many hours, with immense data sets being produced. When imaging beam sensitive…

Scanning transmission electron microscopy (STEM) plays a critical role in modern materials science, enabling direct imaging of atomic structures and their evolution under external interferences. However, interpreting time-resolved STEM data…

Computer Vision and Pattern Recognition · Computer Science 2025-08-15 Hao Wang , Hongkui Zheng , Kai He , Abolfazl Razi

Electron backscatter diffraction (EBSD) in the scanning electron microscope is routinely used for microstructural characterisation of polycrystalline materials. Maps of EBSD data are typically acquired at high stage tilt and slow scan…

Materials Science · Physics 2020-09-01 Vivian Tong , Thomas Benjamin Britton

Complex blur such as the mixup of space-variant and space-invariant blur, which is hard to model mathematically, widely exists in real images. In this paper, we propose a novel image deblurring method that does not need to estimate blur…

Computer Vision and Pattern Recognition · Computer Science 2020-11-17 Chunzhi Gu , Xuequan Lu , Ying He , Chao Zhang

Scanning Electron Microscopy (SEM) is indispensable in modern materials science, enabling high-resolution imaging across a wide range of structural, chemical, and functional investigations. However, SEM imaging remains constrained by…