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Recent advances in nanotechnology have created the need to manufacture three-dimensional nanostructures with controlled material composition. Focused Electron Beam Induced Deposition (FEBID) is a nanoprinting technique offering highest…

Mesoscale and Nanoscale Physics · Physics 2025-09-30 Jakub Jurczyk , Leo Brockhuis , Amalio Fernández-Pacheco , Ivo Utke

Directed atomic fabrication using an aberration-corrected scanning transmission electron microscope (STEM) opens new pathways for atomic engineering of functional materials. In this approach, the electron beam is used to actively alter the…

Direct-write processes enable the alteration or deposition of materials in a continuous, directable, sequential fashion. In this work we demonstrate an electron beam direct-write process in an aberration-corrected scanning transmission…

Materials Science · Physics 2023-03-22 Ondrej Dyck , Andrew R. Lupini , Stephen Jesse

Electrodeposition of tantalum coating was performed from an ionic liquid, BMP[Tf2N], in the presence of dissolved anhydrous TaF5 and LiF. Superficial X-ray photoelectron spectroscopy supplemented by an argon ion etching and depth profiling…

Applied Physics · Physics 2025-05-27 Helena Simunkova , Eva Kolibalova , Lukas Kalina , Tomas Lednicky , Jaromir Hubalek

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack…

The directed self-assembly of colloidal nanoparticles (NPs) using external fields guides the formation of sophisticated hierarchical materials but becomes less effective with decreasing particle size. As an alternative, electron-beam-driven…

Soft Condensed Matter · Physics 2024-09-13 Jonathan G. Raybin , Ethan J. Dunsworth , Veronica Guo , Naomi S. Ginsberg

A method for the evaluation of the angular width of an electron beam generated by a nanoconstriction is proposed and demonstrated. The approach is based on analysis of a narrow-width electron flow, that quantizes into modes inside a…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 R. N. Gurzhi , A. N. Kalinenko , A. I. Kopeliovich , A. V. Yanovsky , E. N. Bogachek , Uzi Landman

In the present work we report about a parallel-processing ion beam fabrication technique whereby high-density sub-superficial graphitic microstructures can be created in diamond. Ion beam implantation is an effective tool for the structural…

The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors of particular properties. To create a new precursor,…

Mesoscale and Nanoscale Physics · Physics 2025-11-06 Benedykt R. Jany , Katarzyna Madajska , Aleksandra Butrymowicz-Kubiak , Franciszek Krok , Iwona B. Szymańska

Focused ion beam milling allows manipulation of the shape and size of nanostructures to create geometries potentially useful for opto-electronics, thermoelectrics, and quantum computing. We focus on using the ion beam to control the…

Materials Science · Physics 2017-10-20 Sarah Friedensen , Jerome T. Mlack , Marija Drndić

A series of MnxZn1-xO (x=0.03, 0.05) nanostructures have been grown via the solution based chemical spray pyrolysis technique. Electron beam induced modifications on structural, linear and nonlinear optical and surface morphological…

The advancement of liquid phase electron beam induced deposition has enabled an effective direct-write approach for functional nanostructure synthesis with the possibility of three-dimensional control of morphology. For formation of a…

Atomic and Molecular Clusters · Physics 2024-03-12 Auwais Ahmed , Peter A. Kottke , Andrei G. Fedorov

Scanning Electron Microscopy (SEM) experiments provide detailed insights into material microstructures, enabling high-resolution imaging as well as crystallographic analysis through advanced techniques like Electron Backscatter Diffraction…

Materials Science · Physics 2024-12-05 Christina Koenig , Alice Bastos da Silva Fanta , Joerg R. Jinschek

We study the impact of optical field-enhancement effects on the optoelectronic properties of metal nanoparticle arrays. Applying a focused ion beam lithography in combination with an electron beam deposition technique we can pattern…

Mesoscale and Nanoscale Physics · Physics 2010-04-30 Markus A. Mangold , Christoph Weiss , Beate Dirks , Alexander W. Holleitner

Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex…

Mesoscale and Nanoscale Physics · Physics 2020-02-24 Michael Huth , Fabrizio Porrati , Oleksandr V. Dobrovolskiy

Realizing active metasurfaces with substantial tunability is important for many applications but remains challenging due to difficulties in dynamically tuning light-matter interactions at subwavelength scales. Here, we introduce reversible…

The integration of photonic components into surface ion traps provides a scalable approach for trapped-ion quantum computing, sensing, and metrology, enabling compact systems with enhanced stability and precision. However, the introduction…

Quantum Physics · Physics 2025-04-01 Guochun Du , Elena Jordan , Tanja E. Mehlstäubler

Key circumstance of radical progress for technology of XXI century is the development of a technique which provides controllable producing three-dimensional patterns incorporating regions of nanometer sizes and required physical and…

Plasmonic gratings and nano-particle arrays in a metal-insulator-metal structures are fabricated on an erbium doped silicon nitride layer. This material system enables simple fabrication of the structure, since the active nitride layer can…

Optics · Physics 2015-05-14 Yiyang Gong , Selcuk Yerci , Rui Li , Luca Dal Negro , Jelena Vuckovic

We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of W nanostructures on SiO2 substrates using Monte Carlo simulation of electron transport. This study gives a quantitative insight…

Mesoscale and Nanoscale Physics · Physics 2013-11-26 Francesc Salvat-Pujol , Harald O. Jeschke , Roser Valenti