Related papers: Process nano scale mechanical properties measureme…
A new concept of micromachines has been developed for measuring the mechanical properties of thin metallic films. The actuator is a beam undergoing large internal stresses built up during the deposition process. Al thin films are deposited…
The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical…
In this work we present the design of a new test geometry inspired by the Tapered Double Cantilever Beam (TDCB) specimen that is shown to provide an improved characterization of the fracture properties of brittle solids. First, we show that…
We present a universal nanomechanical sensing platform for the investigation of magnetostriction in thin films. It is based on a doubly-clamped silicon nitride nanobeam resonator covered with a thin magnetostrictive film. Changing the…
We developed a process to fabricate nanoscale metallic gate electrodes on scanning probe cantilevers, including on the irregular surface of protruding cantilever tips. The process includes a floating-layer technique to coat the cantilevers…
The profile of suspended silicon nitride thin films patterned with one-dimensional subwavelength grating structures is investigated using Atomic Force Microscopy. We first show that the results of the profilometry can be used as input to…
This work aims to identify common challenges in the preparation of the blister test devices designed for measurement of energy release rate for brittle thin films and to propose easy-to-implement solutions accordingly. To this end, we…
Understanding the generation of mechanical stress in drying, particle-laden films is important for a wide range of industrial processes. The cantilever experiment allows the stress in a drying film that has been deposited onto a thin plate…
Numerical Simulations are employed to create amorphous nano-films of a chosen thickness on a crystalline substrate which induces strain on the film. The films are grown by a vapor deposition technique which was recently developed to create…
Nanoindentation is an effective way of finding mechanical properties at nanoscale. They are especially useful for thin films where elimination of the substrate effect is required. The mechanism is based upon depth sensing indentation based…
Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure…
A detailed investigation of the structural and vibrational properties of various prestressed silicon nitride membranes patterned with one-dimensional photonic crystal structures is presented. The tensile stress-related deformation of the…
We present here a novel cantilever based apparatus to perform translational stress or strain controlled rheology in very soft solids, and obtain simultaneous confocal imaging of the 3 dimensional microstructure. The stress is measured using…
We present a novel experimental setup to investigate two-dimensional thermal convection in a freestanding thin liquid film. We develop a setup for the reproducible generation of freestanding thin liquid films. Such films can be produced in…
We suggest the nondestructive method for determination of the dielectric constant of substrate-deposited thin films by capacitance measurement with two parallel wires placed on top of the film. The exact analytical formula for the…
Diffraction of light beams from the phase steps due to the abrupt changes in the boundary of step leads to Fresnel fringes that their visibility and intensity profile depend on the change of the step height or light incident angle. The…
This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable…
We present mechanical measurements performed at low temperatures on cantilever-based microelectro-mechanicalstructures(MEMS) coated with a metallic layer. Two very different coatings are presented in order to illustrate the capabilities of…
We propose a numerical tool to mimic the pulsed deposition of nanoparticles, a technique used to fabricate thin films from the deposition of nanoparticles upon a substrate. We employ such tool under different initial conditions, in…
The reliable operation of micro and nanomechanical devices necessitates a thorough knowledge of the water film thickness present on the surfaces of these devices with an accuracy in the nm range. In this work, the thickness of an ultra-thin…