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Grayscale lithography allows the creation of micrometer-scale features with spatially-controlled height in a process that is fully compatible with standard lithography. Here, solid immersion lenses are demonstrated in silicon carbide using…
Featured by prominent flexibility and fidelity in producing sophisticated stereoscopic structures transdimensionally, three-dimensional (3D) laser printing technique has vastly extended the toolkit for delivering diverse functional devices.…
We adapted a conventional microscope for projection photolithography using an ultraviolet (UV) light-emitting diode (LED) as a light source. The use of a UV LED provides the microscope projector with several advantages in terms of…
Porous materials are relevant for a broad range of technologies from catalysis and filtration, to tissue engineering and lightweight structures. Controlling the porosity of these materials over multiple length scales often leads to enticing…
A powerful and flexible method of 3D nano-printing, based on focusing charged aerosol, has been developed. The self-consistent electric field configuration, created with a holey floating mask and used as the scaffold for printing…
Throughput and resolution are both of critical importance for modern manufacturing, however, they are usually contradictory with each other. Here, a high-throughput high-resolution three dimensional (3D) printing is demonstrated by…
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in-situ melting, for centimeter-scale and bonding-free fabrication of…
Large-scale, high-precision, and high-transparency microchannels hold great potential for developing high-performance continuous-flow photochemical reactions. We demonstrate ultrafast laser-enabled fabrication of 3D microchannel reactors in…
Security labels combining facile structural color readout and physically unclonable one-way function (PUF) approach provide promising strategy for fighting against forgery of marketable products. Here, we justify direct femtosecond-laser…
Light-based additive manufacturing techniques enable a rapid transition from object design to production. In these approaches, a 3D object is typically built by successive polymerization of 2D layers in a photocurable resin. A recently…
The ultimate feature size is key in ultrafast laser material processing. A capacity to signiicantly exceed optical limits and to structure below 100nm is essential to advance ultrafast processing into the field of metamaterials. Such…
We explore the ultrahigh-vacuum (UHV) compatibility of Formlabs `Clear Resin' via vat photopolymerization (VPP). We report on a method for using VPP additive manufacturing, specifically Formlabs' widely available stereolithographic (SLA)…
We report three-dimensional laser microfabrication, which enables microstructuring of materials on the scale of 0.2-1 micrometers. The two different types of microfabrication demonstrated and discussed in this work are based on holographic…
We implemented the inverse design method to build a thin near-field lens that could produce a desired subwavelength focus by manipulating the near fields of a magnetic dipole source. The flat near-field lens represented by an artificial…
We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use of standard industrial high throughput silicon processing techniques: UV Nano Imprint Lithography (UV-NIL) combined with continuous Reactive…
On-chip optical trapping systems allow for high scalability and lower the barrier to access. Systems capable of trapping multiple particles typically come with high cost and complexity. Here we present a technique for making parabolic…
Metasurfaces enable precise control over the properties of light and hold promise for commercial applications. However, fabricating visible metasurfaces suitable for high-volume production is challenging and requires scalable processes.…
Direct writing laser (DWL) grayscale lithography is introduced as a novel fabrication technique for multi-plane light conversion (MPLC) phase masks, enabling direct transfer of precise depth profiles onto substrates via reactive ion etching…
Pixelated plastic scintillator arrays can serve as high efficiency and high resolution neutron imaging detectors. Manufacturing these arrays is intensive in both time and labor. This work presents a fabrication method based on additive…
Advances in the development of free-electron lasers offer the realistic prospect of high-resolution imaging to study the nanoworld on the time-scale of atomic motions. We identify X-ray Fourier Transform holography, (FTH) as a promising…