Related papers: Integrated RF MEMS/CMOS Devices
We experimentally demonstrate tunable, highly-stable frequency combs with high repetition-rates using a single, charge injection based silicon PN modulator. In this work, we demonstrate combs in the C-band with over 8 lines in a 20-dB…
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…
While the on-chip processing power in circuit QED devices is growing rapidly, an open challenge is to establish high-fidelity quantum links between qubits on different chips. Here, we show entanglement between transmon qubits on different…
A hemispherical multilayer wide-band (7-13 GHz) band-pass frequency selective surface (FSS) is reported. A new design technique based on a Goldberg discretization and unit cell scaling technique is introduced to accommodate the curved…
Due to their capacity for non-classical light generation, high-efficiency second-order nonlinear parametric processes play an important role in quantum photonic technology, and chip-scale realization of these processes is recognized as the…
All-dielectric optical metasurfaces can locally control the amplitude and phase of light at the nanoscale, enabling arbitrary wavefront shaping. However, lack of post-fabrication tunability has limited the true potential of metasurfaces for…
Performant on-chip spectrometers are important for advancing sensing technologies, from environmental monitoring to biomedical diagnostics. As device footprints approach the scale of the operating wavelength, previously strategies,…
Metasurfaces with tunable spatial phase functions could benefit numerous applications. Currently, most approaches to tuning rely on mechanical stretching which cannot control phase locally, or by modulating the refractive index to exploit…
CMOS pixel sensors (CPS) represent a novel technological approach to building charged particle detectors. CMOS processes allow to integrate a sensing volume and readout electronics in a single silicon die allowing to build sensors with a…
The rapidly maturing integrated Kerr microcombs show significant potential for microwave photonics. Yet, state-of-the-art microcomb based radiofrequency (RF) filters have required programmable pulse shapers, which inevitably increase the…
This paper describes a highly integrated, low power chip solution for ECG signal processing in wearable devices. The chip contains an instrumentation amplifier with programmable gain, a band-pass filter, a 12-bit SAR ADC, a novel QRS…
We have designed, fabricated and measured high-Q $\lambda/2$ coplanar waveguide microwave resonators whose resonance frequency is made tunable with magnetic field by inserting a DC-SQUID array (including 1 or 7 SQUIDs) inside. Their…
Increasing the density of superconducting circuits requires compact components, however, superconductor-based capacitors typically perform worse as dimensions are reduced due to loss at surfaces and interfaces. Here, parallel plate…
Reconfigurable Intelligent Surfaces (RISs) exhibit promising enhancements in coverage and data rates for wireless communication systems, particularly in the context of 5G and beyond. This paper introduces a novel approach by focusing on the…
Femtosecond Laser Micromachining (FLM) is a powerful technology for the fabrication of photonic devices. In this context, the integration of resonant elements within the platform represents a key advancement, enhancing both its versatility…
In this paper, design and simulation of a compact on-chip antenna for 60 GHz band applications is presented. Antenna is designed in 65nm TSMC technology. This technology consists of 9 metal layers. A 0.7 mm * 0.7 mm patch with slots is…
A single tunable filter simplifies complexity, reduces insertion loss, and minimizes size compared to frequency switchable filter banks commonly used for radio frequency (RF) band selection. Magnetostatic wave (MSW) filters stand out for…
We demonstrate strong optical nonreciprocity in microring add-drop filters with asymmetric input and output coupling coefficients. Up to 18dB isolation was achieved with a silicon-on-insulator high-Q microring of 5 micrometer radius.
Organic printed electronics is proving its suitability for the development of wearable, lightweight, distributed applications in combination with cost-effective production processes. Nonetheless, some necessary features for several…
This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require…