Related papers: Above Ic Micro-Power Generators for RF-Mems
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
We demonstrate here a proof-of-concept experiment that microelectromechanical systems (MEMS) can be actuated using photoelectrowetting. In order to demonstrate this, a 30 \mu m thick aluminum cantilever is actuated using an ordinary white…
This paper is concerned with generators that harvest electrical energy from the kinetic energy present in the sensor nodes environment. These generators have the potential to replace or augment battery power which has a limited lifetime and…
In this study, we developed a top/down methodology for behavioral and structural modeling of multi-domain microsystems. Then, we validated this methodology through a study case : a piezoelectric microgenerator. We also proved the…
A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its…
Energy self sufficiency, as well as optimal management of power in buildings is gaining importance, while obtaining power from traditional fossil energy sources is becoming more and more expensive. In this context, millimeter scale…
This paper presents and analyses a Constraint Energy Minimization Generalized Multiscale Finite Element Method (CEM-GMsFEM) for solving single-phase non-linear compressible flows in highly heterogeneous media. The construction of CEM-GMsFEM…
We characterise the performance of a surface-electrode ion "chip" trap fabricated using established semiconductor integrated circuit and micro-electro-mechanical-system (MEMS) microfabrication processes which are in principle scalable to…
Here we report the development of high-efficiency microscale GaAs laser power converters, and their successful transfer printing onto silicon substrates, presenting a unique, high power, low-cost and integrated power supply solution for…
Molecular-scale diodes made from self-assembled monolayers (SAMs) could complement silicon-based technologies with smaller, cheaper, and more versatile devices. However, advancement of this emerging technology is limited by insufficient…
Additive microfabrication processes based on localized electroplating enable the one-step deposition of micro-scale metal structures with outstanding performance, e.g. high electrical conductivity and mechanical strength. They are therefore…
We designed an on-chip transformative optic system of a metalens-photonic crystal resonator metasystem on a foundry compatible silicon photonic platform. By adjusting the on-chip metalens' focusing length and mode dimension, the insertion…
With the demand for improved performance in microfabricated devices, the necessity to apply greater electric fields and voltages becomes evident. When operating in vacuum, the voltage is typically limited by surface flashover forming along…
To reduce transmit power, increase throughput, and improve communication range, radio systems---such as IoT sensor networks, Wi-Fi and cellular networks---benefit from the ability to direct their signals, to ensure that more of the…
The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sense or control physical, optical or chemical quantities, ICs…
Hydrogen plays an important role in the context of global carbon reduction. For an off-grid renewable power to hydrogen system (OReP2HS), a grid-forming (GFM) source is essential to provide frequency and voltage references. Here, we take…
Superconducting circuits are a promising platform for implementing fault-tolerant quantum computers, quantum limited amplifiers, ultra-low power superconducting electronics, and sensors with ultimate sensitivity. Typically, circuit…
Background: we develop the concept of a Micromegas (MICRO-MEsh GAseous Structure) readout plane with an additional GEM (Gas Electron Multiplier) preamplification stage placed a few mm above it, to increase the maximum effective gain of the…
An easy procedure to build up membrane-electrode assemblies for applications dedicated to miniaturized PEMFC using H2 or CH3OH by a two-steps atmospheric plasma process is reported. Firstly, catalyst nanoparticles are grafted on carbon…
Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…