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Micro-scanners have been widely used in many optical applications. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. This paper presents a complete analytical model of the…
We describe a setup and procedures for contactless optical 3D-metrology of silicon micro-strip sensors. Space points are obtained by video microscopy and a high precision XY-table. The XY-dimensions are obtained from the movement of the…
Silicon offers great promise as a potential anode active material and the optimum alternative to lithium metal in all-solid-state lithium-ion batteries. However, its practical application is limited by severe volume expansion (~300%) during…
This paper presents the detailed simulation of a double-pixel structure for charged particle detection based on the 3D-trench silicon sensor developed for the TIMESPOT project and a comparison of the simulation results with measurements…
We summarize the R&D activities on a novel semitransparent microstrip sensor to be used on laser-based alignment systems for silicon trackers. The new sensor is used both for particle tracking and laser detection. The aim of this research…
A sensor for thermal and thermodynamic measurements of small magnetic systems have been designed and built. It is based on a 5μm-thick suspended polymer membrane, which has a very low heat capacity (≈ 10-6 J/K at nitrogen…
The sliding friction force exerted by stochastic linkers interacting with a moving filament is calculated. The elastic properties of the substrate on which the linkers are anchored are shown to strongly influence the friction force. In some…
Silicon microstrip detectors are widely used in experiments for space astronomy. Before the detector is assembled, extensive characterization of the silicon microstrip sensors is indispensable and challenging. This work electrically…
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers,…
Any two objects in contact with each other exert a force that could be simply due to gravity or mechanical contact, such as a robotic arm gripping an object or even the contact between two bones at our knee joints. The ability to naturally…
Tactile sensors can significantly enhance the perception of humanoid robotics systems by providing contact information that facilitates human-like interactions. However, existing commercial tactile sensors focus on improving the resolution…
We describe feedhorn-coupled polarization-sensitive detector arrays that utilize monocrystalline silicon as the dielectric substrate material. Monocrystalline silicon has a low-loss tangent and repeatable dielectric constant,…
To sustainably support the ongoing energetic transition, we need functional metal oxides capable of converting energy, and produce storage, and sensing devices. However, these materials suffer from a high economic cost of manufacturing, and…
In traditional detection of the magnetic signal in the experiment, complicated electronic devices are usually set up to explore the feedback from the superconducting transition due to the external magnetic field. This kind of direct…
In order to examine the influence of system dynamics on sliding friction, we introduce the so-called micro-walking machine. This model consists of a rigid body with a number of elastic contact spots that is pulled by a constantly moving…
Hydrogenated amorphous silicon (a-Si:H) is a material having an intrinsically high radiation hardness that can be deposited on flexible substrates like Polyimide. For these properties a-Si:H can be used for the production of flexible…
We present an experimental protocol for the fabrication and characterization of scalable microarchitected elastic waveguides. Using silicon microfabrication techniques, we develop free-standing 2D truss-based architected waveguides with a…
Silicon pixel sensors manufactured using commercial CMOS processes are promising instruments for high-energy particle physics experiments due to their high yield and proven radiation hardness. As one of the essential factors for the…
We present a tight-binding calculation that, for the first time, accurately describes the structural, vibrational and elastic properties of amorphous silicon. We compute the interatomic force constants and find an unphysical feature of the…
Silicon oxide (SiOx) has been widely used in many electronic systems as a supportive and insulating medium. Here we demonstrate various electrical phenomena such as negative differential resistance, resistive switching and current…