Split Ga vacancies are the dominant native acceptor in β-Ga2O3; however, their role in α and κ phases has been largely overlooked or assumed to be unfavorable. A detailed understanding of these defects is critical for tailoring the electrical conductivity and optical properties and optimising Ga2O3-based devices. In this work, we used machine learning interatomic potentials (MLIPs) to accelerate the discovery of non-local defect reconstructions, followed by HSE06 hybrid DFT to accurately quantify defect properties of single vacancy VGa, split vacancy VGai and substitutional donors (HfGa and SiGa) across a wide range of experimentally relevant conditions for the oxygen chemical potential. We find that split vacancies are the ground-state vacancy for all studied polymorphs (β, α, and κ). Split vacancies are more stable than simple vacancies by ~0.75 eV (β), ~0.41 eV (α), and ~0.14 eV (κ). Notably, MLIPs correctly identified the specific split-vacancy ground states and yielded an energetic ordering of symmetry-inequivalent defect configurations in excellent agreement with HSE06 results. While Hf and Si show low formation energy and act as shallow donors, especially under oxygen-poor conditions, their efficiency is limited by split-vacancy compensation. The growth under oxygen-poor conditions is a universal requirement to suppress these defects and achieve high n-type conductivity across the Ga2O3 polymorph.
@article{arxiv.2605.28743,
title = {Universal Stability of Ga Split Vacancies across \alpha-, \beta-, and \kappa-Ga2O3 Polymorphs: A Machine-Learning Accelerated Study},
author = {Mohamed Abdelilah Fadla and Myrta Grüning and Lorenzo Stella},
journal= {arXiv preprint arXiv:2605.28743},
year = {2026}
}