English

Universal Stability of Ga Split Vacancies across \alpha-, \beta-, and \kappa-Ga2O3 Polymorphs: A Machine-Learning Accelerated Study

Materials Science 2026-05-28 v1

Abstract

Split Ga vacancies are the dominant native acceptor in β\beta-Ga2O3Ga_2O_3; however, their role in α\alpha and κ\kappa phases has been largely overlooked or assumed to be unfavorable. A detailed understanding of these defects is critical for tailoring the electrical conductivity and optical properties and optimising Ga2O3Ga_2O_3-based devices. In this work, we used machine learning interatomic potentials (MLIPs) to accelerate the discovery of non-local defect reconstructions, followed by HSE06 hybrid DFT to accurately quantify defect properties of single vacancy VGaV_{\text{Ga}}, split vacancy VGaiV_{\text{Ga}}^{\text{i}} and substitutional donors (HfGa\mathrm{Hf_{Ga}} and SiGa\mathrm{Si_{Ga}}) across a wide range of experimentally relevant conditions for the oxygen chemical potential. We find that split vacancies are the ground-state vacancy for all studied polymorphs (β\beta, α\alpha, and κ\kappa). Split vacancies are more stable than simple vacancies by ~0.75 eV (β\beta), ~0.41 eV (α\alpha), and ~0.14 eV (κ\kappa). Notably, MLIPs correctly identified the specific split-vacancy ground states and yielded an energetic ordering of symmetry-inequivalent defect configurations in excellent agreement with HSE06 results. While Hf and Si show low formation energy and act as shallow donors, especially under oxygen-poor conditions, their efficiency is limited by split-vacancy compensation. The growth under oxygen-poor conditions is a universal requirement to suppress these defects and achieve high n-type conductivity across the Ga2O3Ga_2O_3 polymorph.

Keywords

Cite

@article{arxiv.2605.28743,
  title  = {Universal Stability of Ga Split Vacancies across \alpha-, \beta-, and \kappa-Ga2O3 Polymorphs: A Machine-Learning Accelerated Study},
  author = {Mohamed Abdelilah Fadla and Myrta Grüning and Lorenzo Stella},
  journal= {arXiv preprint arXiv:2605.28743},
  year   = {2026}
}