Atomic probe tomography (APT), based on the work of Erwin Mueller, is able to generate three-dimensional chemical maps in atomic resolution. The required instruments for APT have evolved over the last 20 years from an experimental to an established method of materials analysis. Here, we describe the realization of a new instrument concept that allows the direct attachment of APT to a dual beam SEM microscope with the main achievement of fast and direct sample transfer. New operational modes are enabled regarding sample geometry, alignment of tips and microelectrode. The instrument is optimized to handle cryo-samples at all stages of preparation and storage. The instrument comes with its own software for evaluation and reconstruction. The performance in terms of mass resolution, aperture angle, and detection efficiency is demonstrated with a few application examples.
@article{arxiv.2105.03259,
title = {The modular Atom Probe Concept},
author = {Patrick Stender and Helena Solodenko and Andreas Weigel and Irdi Balla and Tim Maximilian Schwarz and Jonas Ott and Manuel Roussell and Rüya Duran and Sebastian Eich and Mohammad Al-Shakran and Timo Jacob and Guido Schmitz},
journal= {arXiv preprint arXiv:2105.03259},
year = {2021}
}