English

Sparse Iterative Learning Control with Application to a Wafer Stage: Achieving Performance, Resource Efficiency, and Task Flexibility

Systems and Control 2020-03-30 v1

Abstract

Trial-varying disturbances are a key concern in Iterative Learning Control (ILC) and may lead to inefficient and expensive implementations and severe performance deterioration. The aim of this paper is to develop a general framework for optimization-based ILC that allows for enforcing additional structure, including sparsity. The proposed method enforces sparsity in a generalized setting through convex relaxations using 1\ell_1 norms. The proposed ILC framework is applied to the optimization of sampling sequences for resource efficient implementation, trial-varying disturbance attenuation, and basis function selection. The framework has a large potential in control applications such as mechatronics, as is confirmed through an application on a wafer stage.

Keywords

Cite

@article{arxiv.1706.01647,
  title  = {Sparse Iterative Learning Control with Application to a Wafer Stage: Achieving Performance, Resource Efficiency, and Task Flexibility},
  author = {Tom Oomen and Cristian R. Rojas},
  journal= {arXiv preprint arXiv:1706.01647},
  year   = {2020}
}

Comments

12 pages, 14 figures

R2 v1 2026-06-22T20:10:12.487Z