Single shot ultrafast laser processing of high-aspect ratio nanochannels using elliptical Bessel beams
Applied Physics
2017-11-22 v1 Optics
Abstract
Ultrafast lasers have revolutionized material processing, opening a wealth of new applications in many areas of science. A recent technology that allows the cleaving of transparent materials via non-ablative processes is based on focusing and translating a high-intensity laser beam within a material to induce a well-defined internal stress plane. This then enables material separation without debris generation. Here, we use a non-diffracting beam engineered to have a transverse elliptical spatial profile to generate high aspect ratio elliptical channels in glass of dimension 350 nm x 710 nm, and subsequent cleaved surface uniformity at the sub-micron level.
Keywords
Cite
@article{arxiv.1710.03678,
title = {Single shot ultrafast laser processing of high-aspect ratio nanochannels using elliptical Bessel beams},
author = {R. Meyer and M. Jacquot and R. Giust and J. Safioui and L. Rapp and L. Furfaro and P. -A. Lacourt and J. M. Dudley and F. Courvoisier},
journal= {arXiv preprint arXiv:1710.03678},
year = {2017}
}
Comments
5 pages, 4 figures