English

Scalable photonic crystal waveguides with 2 dB component loss

Optics 2023-05-09 v1 Applied Physics

Abstract

Periodic or gradient subwavelength structures are basic configurations of photonic crystals and metamaterials. The measured linear losses of those nanophotonic devices are well-beyond theoretical predictions. Nanofabrication related geometric inhomogeneity is considered as the primary cause of the deleterious performance. The deep-UV photolithography in CMOS foundry is a large-scale parallel processing, which can significantly suppress the random offsets and thus the optical linear loss. Here we demonstrate ultra-low loss photonic crystal waveguides with a multi-project wafer run through AIM photonics and post-processing. For sub-millimeter long photonic crystal waveguides, 2 dB total loss and 40 dB extinction ratio are observed across dies.

Keywords

Cite

@article{arxiv.2305.04337,
  title  = {Scalable photonic crystal waveguides with 2 dB component loss},
  author = {Yahui Xiao and Feifan Wang and Dun Mao and Thomas Kananen and Tiantian Li and Hwaseob Lee and Zi Wang and Tingyi Gu},
  journal= {arXiv preprint arXiv:2305.04337},
  year   = {2023}
}

Comments

10 pages 4 figures. arXiv admin note: substantial text overlap with arXiv:2104.09293

R2 v1 2026-06-28T10:28:07.468Z