Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM
Abstract
The quantitative lateral resolution is a reliable measure for the quality of an XPS microprobe equipped with a focused X-ray beam. It describes the long tail contributions of the X-ray beam intensity distribution. The knowledge of these long tail contributions is essential when judging on the origin of signals of XPS spectra recorded on small-sized features. In this round robin test the quantitative lateral resolution of 7 PHI XPS microprobes has been estimated. As expected, the quantitative lateral resolution has significantly larger values than the nominal X-ray beam diameter. The estimated values of the quantitative lateral resolution follow a trend in time: The newer the monochromator of an XPS microprobe so much the better the quantitative lateral resolution.
Keywords
Cite
@article{arxiv.1605.02692,
title = {Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM},
author = {U. Scheithauer and M. Kolb and G. A. M. Kip and E. Naburgh and J. H. M. Snijders},
journal= {arXiv preprint arXiv:1605.02692},
year = {2016}
}
Comments
7 pages, 3 figures, 1 table