A simple procedure is demonstrated for fabrication of waveplates which can be released from substrate by laser cutting. Oblique angle deposition, chemical etching and laser inscription steps were used for the final lift-off and release of micro-waveplates in HCl solution.
Cite
@article{arxiv.1907.05485,
title = {Releasable micro-waveplates},
author = {L. Grineviciute and T. Tolenis and M. Ryu and T. Moein and S. -H. Ng and T. Katkus and Jovan Maksimovic and R. Drazdys and J. Morikawa and S. Juodkazis},
journal= {arXiv preprint arXiv:1907.05485},
year = {2019}
}