Experimental quantum information processing with superconducting circuits is rapidly advancing, driven by innovation in two classes of devices, one involving planar micro-fabricated (2D) resonators, and the other involving machined three-dimensional (3D) cavities. We demonstrate that circuit quantum electrodynamics can be implemented in a multilayer superconducting structure that combines 2D and 3D advantages. We employ standard micro-fabrication techniques to pattern each layer, and rely on a vacuum gap between the layers to store the electromagnetic energy. Planar qubits are lithographically defined as an aperture in a conducting boundary of the resonators. We demonstrate the aperture concept by implementing an integrated, two cavity-modes, one transmon-qubit system.
@article{arxiv.1509.01619,
title = {Planar multilayer circuit quantum electrodynamics},
author = {Z. K. Minev and K. Serniak and I. M. Pop and Z. Leghtas and K. Sliwa and M. Hatridge and L. Frunzio and R. J. Schoelkopf and M. H. Devoret},
journal= {arXiv preprint arXiv:1509.01619},
year = {2016}
}