Particle lofting from substrate exposed to plasma and electron beam
Plasma Physics
2020-11-19 v1 Applied Physics
Computational Physics
Abstract
A nanometer-sized dielectric particle lying on a dielectric substrate is exposed to the flux of low-energy electrons, ion and electron fluxes from a cold plasma and the fluxes from the combination of these two sources with the help of particle-in-cell simulation to investigate the particle lofting phenomenon. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration, and the explanation of the dust levitation.
Cite
@article{arxiv.2011.09204,
title = {Particle lofting from substrate exposed to plasma and electron beam},
author = {P. V. Krainov and V. V. Ivanov and D. I. Astakhov and V. V. Medvedev and V. V. Kvon and A. M. Yakunin and M. A. van de Kerkhof},
journal= {arXiv preprint arXiv:2011.09204},
year = {2020}
}
Comments
5 pages, 7 figures