Dielectric particle lofting from dielectric substrate exposed to low energy electron beam
Applied Physics
2020-11-19 v1 Computational Physics
Plasma Physics
Abstract
The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low energy electron beam. The article discusses the electron accumulation between such a substrate and a particle lying on it, that can cause a particle lofting. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration and the explanation of the dust levitation.
Keywords
Cite
@article{arxiv.2001.07992,
title = {Dielectric particle lofting from dielectric substrate exposed to low energy electron beam},
author = {P. V. Krainov and V. V. Ivanov and D. I. Astakhov and M. A. van de Kerkhof and V. V. Kvon and V. V. Medvedev and A. M. Yakunin},
journal= {arXiv preprint arXiv:2001.07992},
year = {2020}
}
Comments
5 pages, 5 figures