Numerical analysis of the morphological and phase changes in the TiN/Al_{2}O_{3} coating under high current electron beam modification

A. D. Pogrebnjak; V. N. Borisyuk; A. A. Bagdasaryan

doi:10.5488/CMP.16.33803

Numerical analysis of the morphological and phase changes in the TiN/Al_{2}O_{3} coating under high current electron beam modification

Materials Science 2013-10-07 v1

Authors: A. D. Pogrebnjak , V. N. Borisyuk , A. A. Bagdasaryan

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Abstract

A modification of the surface structure of the hybrid coating TiN/Al_{2}O_{3} with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with an increase of the beam energy, the surface becomes more regular and uniform.

Keywords

TiN/Al_{2}O_{3} coating electron beam modification surface roughness multifractal detrended fluctuation analysis MF-DFA morphological changes phase changes

Cite

@article{arxiv.1310.1235,
  title  = {Numerical analysis of the morphological and phase changes in the TiN/Al_{2}O_{3} coating under high current electron beam modification},
  author = {A. D. Pogrebnjak and V. N. Borisyuk and A. A. Bagdasaryan},
  journal= {arXiv preprint arXiv:1310.1235},
  year   = {2013}
}

Comments

8 pages, 6 figures

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